wbdiff for Ge clean?

Mary Tang mtang at snf.stanford.edu
Thu Oct 14 10:29:20 PDT 2004

Hello SpecMat'ers --

I think this is a question for Jim & Mike....   The wbsilicide bench 
moves next week and the maintenance guys are allocating two weeks for 
re-installation and County inspection approval.  Abhijit Pethe has been 
using the HF tank for cleaning his Ge wafers.  Would it be possible for 
him to use one of the wbdiff HF tanks for his process while the 
wbsilicide bench is unavailable?  Is it possible to put in some sort of 
precautionary measures (i.e. changing out acid) to reassure other users 
that contamination is not an issue?

Can we get an answer soon?  (The bench goes down on Monday.)



Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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