nickel silicide process concern in SNF.

Yuan jun_yuan at
Thu Oct 28 22:46:35 PDT 2004

Dear committee:
I plan to use the nickel silicide process soon in this lab ( I plan to
deposit nickel in the new machine which is semi-clean, based on the
conversion with Ed Myers), but I really want to know
whether I can use the other clean or semiclean tools after the nickel
silicide process(i,e, could the nickel silicide be treated similar to
ti-silicide ?).
I do wish I can get this answer soon, so that I can plan it ACCORDINGLY.

Jun Yuan
Electrical Engineering department,
University of California, Los Angeles
Tel: 1-310-206-7331 (O)
Tel: 1-310-313-6681 (H)

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