Request to use Hf in the Innotec

Abhijit Pethe pethe at stanford.edu
Thu Sep 23 16:09:24 PDT 2004


Hi,

 

We would like to use Hafnium in the Innotec evaporation tool. We want to use
it for investigating contact resistances to semiconductor devices.  Attached
to this email please find

1.	Material Usage request sheet as specified on the website
2.	MSDS for Hf from website
3.	A copy of the materials certification form from the vendor. I have
it available in hardcopy. I have attached an excel sheet with the relevant
information.

 

Please let me know if you need any more information.

Thanks

Abhijit

 

Abhijit Jayant Pethe

PhD Candidate

Department of Electrical Engineering

Stanford University, CA 

Phone :(O)(650)-725-3608; (C) (650)-387-6435

e-mail:  <mailto:pethe at stanford.edu> pethe at stanford.edu

 

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