processing request

Paul Rissman rissman at stanford.edu
Wed Apr 6 09:57:21 PDT 2005


I don't think there should be any problem as semiclean b.

Paul

At 09:07 AM 4/6/2005 -0700, you wrote:
>Any objections in letting Ankur use the LTO for his Ni/Ti films?   If I 
>don't hear by noon today, I'll assume it's okay.     -mike
>
>
>At 02:01 PM 4/5/2005, Mary Tang wrote:
>>Hi Mike, et al --
>>
>>It sounds good to me.  Is that a quorum?
>>
>>Mary
>>
>>Michael Deal wrote:
>>
>>>I told Ankur that it seems that we can consider his films to be 
>>>semi-cleanB and thus go into the LTO, but that we need a consensus of 
>>>specmat.   He would appreciate it if we could decide this before the 
>>>next specmat meeting, as he has already gone through 1 or 2 of the 
>>>specmat cycles.
>>>                                                 -mike
>>>
>>>
>>>At 01:15 PM 4/5/2005, Ankur Jain wrote:
>>>
>>>>Hello SpecMat members,
>>>>  Following my request to allow processing of my wafers containing a Ni-Ti
>>>>film in the LTO furnace, I had a brief meeting with Mike discussing my
>>>>process flow. TiNi Alloy Company, the vendor that sputters these Ni-Ti
>>>>films for me uses a Perkin-Elmer 4450 sputterer that is used exclusively
>>>>for depositing Ni-Ti, and no other metals. They have done Auger
>>>>spectroscopy on their films in the past and the only significant surface
>>>>contamination observed was elemental carbon, which they say is normal for
>>>>anything exposed to air.
>>>>  Following my discussion with Mike, who agreed in principle to let me use
>>>>the LTO tube, I am sending this email to SpecMat with a request to kindly
>>>>expedite a final decision on my request. I would appreciate it very much
>>>>if I can get started on my microfabrication soon.
>>>>
>>>>thanks,
>>>>
>>>>Ankur
>>>>
>>>>
>>>>On Mon, 4 Apr 2005, Michael Deal wrote:
>>>>
>>>> > LTO is semicleanB, so it's okay to put Ni and Ti in there as long as 
>>>> the Ni
>>>> > and Ta are not contaminated from somewhere else.  (We allow Ni and Ta
>>>> > deposited in the new SCT sputterer to go into semiclean tools now, for
>>>> > example.)     Ankur, where was the NiTi deposited and how clean is
>>>> > it?   (Was it deposited in a system that also does gold or iron?)
>>>> >                                                  0mike
>>>> >
>>>> >
>>>> > At 01:13 PM 4/4/2005, Ankur Jain wrote:
>>>> > >Hello SpecMat members,
>>>> > >  I have six 4-inch Si wafers. It has a sandwich of 2 micron 
>>>> thermal oxide
>>>> > >and 2 micron layer of Nickel-Titanium alloy on one side. The other side
>>>> > >has only 2 micron thermal oxide. I would like to deposit about 0.5 
>>>> microns
>>>> > >of LTO on the Nickel-Titanium side. I understand that Ni is not one 
>>>> of the
>>>> > >standard metals allowed on the metal side of the LTO tube.  However,
>>>> > >Maurice suggested that I write to SpecMat and find out if it might be
>>>> > >possible to do a one-time deposition just before the LTO tube is 
>>>> scheduled
>>>> > >for pull and clean. Please let me know if that would be possible.
>>>> > >  If you have any other suggestions for depositing an electrically
>>>> > >passivating layer that will still let my wafers be processed in clean
>>>> > >equipment after deposition, I would welcome them.
>>>> > >
>>>> > >thanks,
>>>> > >
>>>> > >Ankur.
>>>> > >
>>>> > >******************************************************************** 
>>>> * ****
>>>> > >ANKUR JAIN
>>>> > >Graduate Student
>>>> > >Microscale Heat Transfer Laboratories         Residence:
>>>> > >Room 201, Building 530                        126 Blackwelder Ct, 
>>>> Apt 902
>>>> > >Stanford, CA-94305                            Stanford, CA - 94305
>>>> > >Ph: 650-736-0044                              Cell Ph: 650-799-8986
>>>> > >http://www.stanford.edu/~ankurjn
>>>> >
>>>>
>>>>*************************************************************************
>>>>ANKUR JAIN
>>>>Graduate Student
>>>>Microscale Heat Transfer Laboratories         Residence:
>>>>Room 201, Building 530                        126 Blackwelder Ct, Apt 902
>>>>Stanford, CA-94305                            Stanford, CA - 94305
>>>>Ph: 650-736-0044                              Cell Ph: 650-799-8986
>>>>http://www.stanford.edu/~ankurjn
>>
>>
>>--
>>Mary X. Tang, Ph.D.
>>Stanford Nanofabrication Facility
>>CIS Room 136, Mail Code 4070
>>Stanford, CA  94305
>>(650)723-9980
>>mtang at stanford.edu
>>http://snf.stanford.edu
>>





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