Heads up: STS Etch request
mtang at snf.stanford.edu
Mon Apr 11 08:16:27 PDT 2005
Hi all --
Just wanted to give some warning that the Rheosense engineers are going
to submit a SpecMat request to etch silicon-bonded-to-pyrex substrates
on the STS etcher. They say they have a process/spec that they will try
to get from the foundry that is doing this for them now.
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
More information about the specmat