Heads up: STS Etch request

Mary Tang mtang at snf.stanford.edu
Mon Apr 11 08:16:27 PDT 2005

Hi all --

Just wanted to give some warning that the Rheosense engineers are going 
to submit a SpecMat request to etch silicon-bonded-to-pyrex substrates 
on the STS etcher.  They say they have a process/spec that they will try 
to get from the foundry that is doing this for them now.


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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