Heads up: STS Etch request

Mary Tang mtang at snf.stanford.edu
Mon Apr 11 08:16:27 PDT 2005


Hi all --

Just wanted to give some warning that the Rheosense engineers are going 
to submit a SpecMat request to etch silicon-bonded-to-pyrex substrates 
on the STS etcher.  They say they have a process/spec that they will try 
to get from the foundry that is doing this for them now.

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu





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