Process proposal and TXRF data

Brewer, Rhett T rhett.t.brewer at intel.com
Tue Apr 19 15:33:46 PDT 2005


I agree with both of your comments (I don't know how the negative sign
snuck in there).  Thank you for taking a look.  I will await your and
the committee's decision.

 

Regards,

 

Rhett

 

 

________________________________

From: Michael Deal [mailto:mdeal at stanford.edu] 
Sent: Tuesday, April 19, 2005 12:08 PM
To: Brewer, Rhett T; specmat at snf.stanford.edu
Cc: mcvittie at cis.stanford.edu
Subject: Re: Process proposal and TXRF data

 

I just took a quck look at the document and want to make this comment.
In your reason #1 at the bottom, I think you got it backwards.  The
contamination numbers are in doses (atoms/cm2), like in implant doses.
That number IS the total contamination number per square area.  The fact
that it came from a very thin layer does not mean it has less total
contaminants - if anything the contamination concentration (in
atoms/cm3) can be even higher than in a 1 micron layer, depending on the
capture thickness.   We can argue about what units our limits should be
in, but the fact that most contamination analysis is done in doses (and
assumes most contaminants are at or near the surface), and not
concentrations, leads us to use that as the most efficient method.
Your other reasons may argue for letting you use these films, but the
first reason is not acceptable as is. 
                                        -mike
p.s. the contamination levels should be 1e12 cm-2, not 1e-12 cm-2, etc.


At 11:43 AM 4/19/2005, Brewer, Rhett T wrote:



Specmat,
 
I have attached the TXRF data from the Pd, Si, O film we had discussed
previously that I would like to process at Stanford. I have also
included the process flow which was reviewed and accepted by specmat
(provided the material meets contamination specs) for your reference.
 
Finally, there is data for an Al2O3 layer that we would like to use to
cap the Pd, Si,O.  This would be deposited by an outside vendor.
 
Please review this document and don't hesitate to ask questions.  A
decision during the next committee meeting (04/26) would meet my
scheduling needs.
 
Thank you.
 
Regards,
 
Rhett
 
 
Rhett Brewer
Intel Corporation
work: 408-765-8254
cell: 408-655-3448
rhett.t.brewer at intel.com
 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20050419/67432bfc/attachment.html>


More information about the specmat mailing list