Measure alumina and/or Si/Al substrates on the Dektak?

Oberg, Stephanie soberg at collinear.com
Mon Apr 25 17:19:59 PDT 2005


Hi there SpecMat committee -

 

I am a new user of SNF and am interested in doing some substrate
measurements:  roughness, etc.  Is it permitted to use alumina or Si/Al
substrates for this?

 

1)  ALUMINA:  It is 99.6% pure tapecast alumina ceramic, highfired and
polished to about 20 microinch (0.5 micron) on back and 1-2 microinch
(50 nm) on front.  See Kyocera pdf attached.  

 

2)  SI/AL ALLOY:  Our other substrate to be used in the future is Osprey
Si/Al alloy, known as CE-7.  Please see Osprey attached PDF.  

Thanks for your help!

 

Stephanie Oberg

(408) 566-1468

soberg at collinear.com <mailto:soberg at collinear.com> 

Collinear Corporation 

 

1.	Your contact information: Name, Coral login, phone number, email
address and who you work for (your PI or company.) 
	Stephanie Oberg, soberg, (408) 566-1468, soberg at collinear.com
<mailto:soberg at collinear.com> , Collinear Corporation
	
	
2.	The chemical or material. Please provide all common names, trade
names, and CAS numbers where appropriate. Include an MSDS, if available;
or provide the reason, if not. Make sure to include information for any
new secondary chemicals (such as a developer for a new resist). Read the
MSDSs as well as the Stanford Chemical Storage Groups
<http://snf.stanford.edu/Materials/StorageGroup.html>  and the Stanford
Chemical Safety Data Base
<http://ehs.stanford.edu/servlet/chemsafe.lookup.class>  sections on
this website to determine the Storage Group Identifier
<http://snf.stanford.edu/Materials/StorageGroup.html>  and Main Hazard
Class <http://snf.stanford.edu/Materials/HazardClasses.html>  of your
chemical/material. 
	Alumina, alumina substrate, alumina thin film substrate, CAS
1344-28-1 (No MSDS because this is not a chemical, it is just a piece of
non-toxic ceramic.).  
	Si/Al alloy, no CAS number found .  (No MSDS because this is not
a chemical, it is just a piece of metal alloy.)
	
	
3.	Vendor/manufacturer info: address and phone number, website URL.

	Alumina, Kyocera, 
http://global.kyocera.com/prdct/fc/product/material/elec/index.html#c
<http://global.kyocera.com/prdct/fc/product/material/elec/index.html#c> 
	Kyocera Industrial Ceramics Corp.
	2033 O'Toole Ave
	San Jose, CA 95131
	Tel: 408-324-0161
	Fax: 408-435-8327
	
	Si/Al, Osprey Sandvik, 
	Osprey Metals Ltd.,
	Millands
	Neath. SA11 1NJ, UK
	http://www.ospreymetals.co.uk/low_expansion/contact_osprey.htm
	
	
4.	Reason for request: Please give serious thought to this. If you
have any process information (application notes from the vendor,
protocol from another lab, experimental methods section of an article),
please include it, preferably as attachments. Ask yourself these
questions: Is this the latest procedure? Are there newer/safer
alternatives that will also work for my project? Will any of the current
SNF approved chemicals and materials work for me? 
	Technical requirements of our product including thermomechanical
match, compatibility with high temperature (>450 deg C) processing, etc.
	
	
5.	Process Flow: Please provide a detailed process flow description
on how and where you proposed to use this chemical. This should include
all Lab equipment <http://snf.stanford.edu/Equipment/EquipByArea.html>
to be used for processing your wafers once your new chemical or material
has been used (even if your new material is a film that is removed, it
may still pose potential contamination concerns.) Make sure to include
wet benches. Please note that f the chemical/material is to be used in
any the "clean"
<http://snf.stanford.edu/Materials/EquipmentLists/Clean.html>
equipment, purity specifications will be needed. This is most important
for chemicals/material that are not normally used for VLSI device
fabrication. To be allowed into a "clean" tool
<http://snf.stanford.edu/Materials/EquipmentLists/Clean.html> , the
material should MOS grade or better. 
	Currently only interested in metrology.
	
	
6.	Amount and form. How much will you bring in? Is it solid, powder
<http://snf.stanford.edu/Materials/Powders.html>  or liquid? (Note: as a
general rule, powders <http://snf.stanford.edu/Materials/Powders.html>
are not permitted in the cleanroom.) Do you need to mix it to use it? 
	Solid substrate disks, 4" - 8" in diameter.  
	
	
7.	Storage: Will you be storing your chemical/material at SNF? If
so, please note any potential reactivities (this should be on the MSDS).
Storage groups <http://snf.stanford.edu/Materials/StorageGroup.html>
A,B,D and L are stored in the yellow solvent cabinet in the furnace
support area, while storage groups
<http://snf.stanford.edu/Materials/StorageGroup.html>  C, E, F and G are
stored on top of one of the Pass-through Carts. Ensure your chemical
container or material is properly labeled
<http://snf.stanford.edu/Materials/ChemLabels.html> . If there is no
available room, it must be stored by in the bulk storage area. You will
then need to obtain it from receiving area personnel each time you want
to use it and return it to them when you are finished using it (or each
time you leave the lab). Note that there is no storage of
chemicals/materials in the processing lab or at any wet bench. 
	No storage - will be hand carried when needed.  Both materials
can be stored in general storage areas such as warehouses and office
supply cabinets.
	
	
8.	DIsposal: How will you dispose of any waste or excess chemical
or material? In your discussions with experts and vendors, try to
determine the best way to dispose of your spent chemicals and
by-products. Please refer to the SNF Labmembers Safety Manual
<http://snf.stanford.edu/Labmembers/Labmembers.html>  for the different
methods of waste disposal that are available in the lab. 
	Breakage is not foreseen, since both materials are tough, but if
there is breakage, I will treat is the same as broken silicon and bag it
for disposal in the Sharps box.

 

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