410 Processing on Laser Annealed wafers.

Bipin Rajendran bipin at stanford.edu
Thu Apr 28 09:50:48 PDT 2005


Dear SpecMat Members,
I am attaching a detailed run-sheet for continuing the fabrication of transistors after Laser Annealing (at a facility outside SNF that deals with many different metal films). This request was earlier approved broadly, and the attached sheet has the history of all past emails. I would be much obliged if this request is approved at the earliest convinience.
Thanks
Bipin
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