410 Processing on Laser Annealed wafers.

Bipin Rajendran bipin at stanford.edu
Thu Apr 28 10:17:09 PDT 2005


Ooops, Sorry, I missed the attachment.
Thanks
Bipin

----- Original Message ----- 
From: "Mary Tang" <mtang at snf.stanford.edu>
To: "Bipin Rajendran" <bipin at stanford.edu>
Sent: Thursday, April 28, 2005 10:08 AM
Subject: Re: 410 Processing on Laser Annealed wafers.


> Hi Bipin --
> 
> No attachment?
> 
> M
> 
> Bipin Rajendran wrote:
> 
>> Dear SpecMat Members,
>> I am attaching a detailed run-sheet for continuing the fabrication of 
>> transistors after Laser Annealing (at a facility outside SNF that 
>> deals with many different metal films). This request was earlier 
>> approved broadly, and the attached sheet has the history of all past 
>> emails. I would be much obliged if this request is approved at the 
>> earliest convinience.
>> Thanks
>> Bipin
> 
> 
> 
> -- 
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA  94305
> (650)723-9980
> mtang at stanford.edu
> http://snf.stanford.edu
> 
>
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