410 Processing on Laser Annealed wafers.
bipin at stanford.edu
Thu Apr 28 10:17:09 PDT 2005
Ooops, Sorry, I missed the attachment.
----- Original Message -----
From: "Mary Tang" <mtang at snf.stanford.edu>
To: "Bipin Rajendran" <bipin at stanford.edu>
Sent: Thursday, April 28, 2005 10:08 AM
Subject: Re: 410 Processing on Laser Annealed wafers.
> Hi Bipin --
> No attachment?
> Bipin Rajendran wrote:
>> Dear SpecMat Members,
>> I am attaching a detailed run-sheet for continuing the fabrication of
>> transistors after Laser Annealing (at a facility outside SNF that
>> deals with many different metal films). This request was earlier
>> approved broadly, and the attached sheet has the history of all past
>> emails. I would be much obliged if this request is approved at the
>> earliest convinience.
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA 94305
> mtang at stanford.edu
-------------- next part --------------
A non-text attachment was scrubbed...
Size: 32888 bytes
Desc: not available
More information about the specmat