Requesting permission to use alumina as substrate in tylanbpsg

Oberg, Stephanie soberg at
Fri Apr 29 14:37:07 PDT 2005

Hi Mary -

Thanks very much for your prompt response.  We will use only the "gold"

In addition to metrology, we find that we have a need for doing LPCVD of
PSG or BPSG on alumina ONLY (not on Si/Al).  Would there be any concerns
about using alumina as a substrate in tylanbpsg?


Stephanie Oberg
(408) 566-1468

-----Original Message-----
From: Mary Tang [mailto:mtang at] 
Sent: Tuesday, April 26, 2005 7:56 AM
To: Oberg, Stephanie
Cc: SpecMat at; Shi, Daniel; Lan Zhang
Subject: Re: Measure alumina and/or Si/Al substrates on the Dektak?

Hello Stephanie --

Since these are pretty inert, they should be OK to measure on the gold 
dektak system (not the "clean" one). Please be aware that the dektak has

some measurement limitations -- check with Uli or one of the other 
process staff members about your measurement precision needs.


Oberg, Stephanie wrote:

> Hi there SpecMat committee -
> I am a new user of SNF and am interested in doing some substrate 
> measurements: roughness, etc. Is it permitted to use alumina or Si/Al 
> substrates for this?
> 1) ALUMINA: It is 99.6% pure tapecast alumina ceramic, highfired and 
> polished to about 20 microinch (0.5 micron) on back and 1-2 microinch 
> (50 nm) on front. See Kyocera pdf attached.
> 2) SI/AL ALLOY: Our other substrate to be used in the future is Osprey

> Si/Al alloy, known as CE-7. Please see Osprey attached PDF.
> Thanks for your help!
> Stephanie Oberg
> (408) 566-1468
> soberg at <mailto:soberg at>
> Collinear Corporation
>    1. * Your contact information: * Name, Coral login, phone number,
>       email address and who you work for (your PI or company.)
>       * Stephanie Oberg, soberg, (408) 566-1468, soberg at
>       <mailto:soberg at>, Collinear Corporation *
>    2. * The chemical or material. * Please provide all common names,
>       trade names, and CAS numbers where appropriate. Include an MSDS,
>       if available; or provide the reason, if not. Make sure to
>       include information for any new secondary chemicals (such as a
>       developer for a new resist). Read the MSDSs as well as the
>       Stanford Chemical Storage Groups
>       <> and the
>       Stanford Chemical Safety Data Base
>       <> sections
>       on this website to determine the Storage Group Identifier
>       <> and Main
>       Hazard Class
>       <> of your
>       chemical/material.
>       *Alumina, alumina substrate, alumina thin film substrate, CAS
>       1344-28-1 (No MSDS because this is not a chemical, it is just a
>       piece of non-toxic ceramic.).
>       Si/Al alloy, no CAS number found . (No MSDS because this is not
>       a chemical, it is just a piece of metal alloy.)
>       *
>    3. * Vendor/manufacturer info: * address and phone number, website
>       URL.
>       *Alumina, Kyocera,
>       Kyocera Industrial Ceramics Corp.
>       2033 O'Toole Ave
>       San Jose , CA 95131
>       Tel: 408-324-0161
>       Fax: 408-435-8327
>       Si/Al, Osprey Sandvik,
>       Osprey Metals Ltd.,
>       Millands
>       Neath. SA11 1NJ, UK
>    4. * Reason for request: * Please give serious thought to this. If
>       you have any process information (application notes from the
>       vendor, protocol from another lab, experimental methods section
>       of an article), please include it, preferably as attachments.
>       Ask yourself these questions: Is this the latest procedure? Are
>       there newer/safer alternatives that will also work for my
>       project? Will any of the current SNF approved chemicals and
>       materials work for me?
>       *Technical requirements of our product including
>       thermomechanical match, compatibility with high temperature
>       (>450 deg C) processing, etc.*
>    5. * Process Flow: * Please provide a detailed process flow
>       description on how and where you proposed to use this chemical.
>       This should include *all* * Lab equipment
>       <> *to be used
>       for processing your wafers once your new chemical or material
>       has been used (even if your new material is a film that is
>       removed, it may still pose potential contamination concerns.)
>       Make sure to include wet benches. Please note that f the
>       chemical/material is to be used in any the "clean"
>       <>
>       equipment, purity specifications will be needed. This is most
>       important for chemicals/material that are not normally used for
>       VLSI device fabrication. To be allowed into a "clean" tool
>       <>,
>       the material should MOS grade or better.
>       * Currently only interested in metrology. *
>    6. * Amount and form. * How much will you bring in? Is it solid,
>       powder <> or
>       liquid? (Note: as a general rule, powders
>       <> are not
>       permitted in the cleanroom.) Do you need to mix it to use it?
>       *Solid substrate disks, 4" - 8" in diameter.*
>    7. * Storage: * Will you be storing your chemical/material at SNF?
>       If so, please note any potential reactivities (this should be on
>       the MSDS). Storage groups
>       <> A,B,D and
>       L are stored in the yellow solvent cabinet in the furnace
>       support area, while storage groups
>       <> C, E, F
>       and G are stored on top of one of the Pass-through Carts. Ensure
>       your chemical container or material is properly labeled
>       <>. If there is
>       no available room, it must be stored by in the bulk storage
>       area. You will then need to obtain it from receiving area
>       personnel each time you want to use it and return it to them
>       when you are finished using it (or each time you leave the lab).
>       Note that there is no storage of chemicals/materials in the
>       processing lab or at any wet bench.
>       * No storage - will be hand carried when needed. Both materials
>       can be stored in general storage areas such as warehouses and
>       office supply cabinets. *
>    8. * DIsposal * : How will you dispose of any waste or excess
>       chemical or material? In your discussions with experts and
>       vendors, try to determine the best way to dispose of your spent
>       chemicals and by-products. Please refer to the SNF Labmembers
>       Safety Manual
>       <> for the
>       different methods of waste disposal that are available in the
>       *Breakage is not foreseen, since both materials are tough, but
>       if there is breakage, I will treat is the same as broken silicon
>       and bag it for disposal in the Sharps box.*

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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