Requesting permission to use alumina as substrate in tylanbpsg
soberg at collinear.com
Fri Apr 29 14:37:07 PDT 2005
Hi Mary -
Thanks very much for your prompt response. We will use only the "gold"
In addition to metrology, we find that we have a need for doing LPCVD of
PSG or BPSG on alumina ONLY (not on Si/Al). Would there be any concerns
about using alumina as a substrate in tylanbpsg?
From: Mary Tang [mailto:mtang at snf.stanford.edu]
Sent: Tuesday, April 26, 2005 7:56 AM
To: Oberg, Stephanie
Cc: SpecMat at snf.stanford.edu; Shi, Daniel; Lan Zhang
Subject: Re: Measure alumina and/or Si/Al substrates on the Dektak?
Hello Stephanie --
Since these are pretty inert, they should be OK to measure on the gold
dektak system (not the "clean" one). Please be aware that the dektak has
some measurement limitations -- check with Uli or one of the other
process staff members about your measurement precision needs.
Oberg, Stephanie wrote:
> Hi there SpecMat committee -
> I am a new user of SNF and am interested in doing some substrate
> measurements: roughness, etc. Is it permitted to use alumina or Si/Al
> substrates for this?
> 1) ALUMINA: It is 99.6% pure tapecast alumina ceramic, highfired and
> polished to about 20 microinch (0.5 micron) on back and 1-2 microinch
> (50 nm) on front. See Kyocera pdf attached.
> 2) SI/AL ALLOY: Our other substrate to be used in the future is Osprey
> Si/Al alloy, known as CE-7. Please see Osprey attached PDF.
> Thanks for your help!
> Stephanie Oberg
> (408) 566-1468
> soberg at collinear.com <mailto:soberg at collinear.com>
> Collinear Corporation
> 1. * Your contact information: * Name, Coral login, phone number,
> email address and who you work for (your PI or company.)
> * Stephanie Oberg, soberg, (408) 566-1468, soberg at collinear.com
> <mailto:soberg at collinear.com>, Collinear Corporation *
> 2. * The chemical or material. * Please provide all common names,
> trade names, and CAS numbers where appropriate. Include an MSDS,
> if available; or provide the reason, if not. Make sure to
> include information for any new secondary chemicals (such as a
> developer for a new resist). Read the MSDSs as well as the
> Stanford Chemical Storage Groups
> <http://snf.stanford.edu/Materials/StorageGroup.html> and the
> Stanford Chemical Safety Data Base
> <http://ehs.stanford.edu/servlet/chemsafe.lookup.class> sections
> on this website to determine the Storage Group Identifier
> <http://snf.stanford.edu/Materials/StorageGroup.html> and Main
> Hazard Class
> <http://snf.stanford.edu/Materials/HazardClasses.html> of your
> *Alumina, alumina substrate, alumina thin film substrate, CAS
> 1344-28-1 (No MSDS because this is not a chemical, it is just a
> piece of non-toxic ceramic.).
> Si/Al alloy, no CAS number found . (No MSDS because this is not
> a chemical, it is just a piece of metal alloy.)
> 3. * Vendor/manufacturer info: * address and phone number, website
> *Alumina, Kyocera,
> Kyocera Industrial Ceramics Corp.
> 2033 O'Toole Ave
> San Jose , CA 95131
> Tel: 408-324-0161
> Fax: 408-435-8327
> Si/Al, Osprey Sandvik,
> Osprey Metals Ltd.,
> Neath. SA11 1NJ, UK
> 4. * Reason for request: * Please give serious thought to this. If
> you have any process information (application notes from the
> vendor, protocol from another lab, experimental methods section
> of an article), please include it, preferably as attachments.
> Ask yourself these questions: Is this the latest procedure? Are
> there newer/safer alternatives that will also work for my
> project? Will any of the current SNF approved chemicals and
> materials work for me?
> *Technical requirements of our product including
> thermomechanical match, compatibility with high temperature
> (>450 deg C) processing, etc.*
> 5. * Process Flow: * Please provide a detailed process flow
> description on how and where you proposed to use this chemical.
> This should include *all* * Lab equipment
> <http://snf.stanford.edu/Equipment/EquipByArea.html> *to be used
> for processing your wafers once your new chemical or material
> has been used (even if your new material is a film that is
> removed, it may still pose potential contamination concerns.)
> Make sure to include wet benches. Please note that f the
> chemical/material is to be used in any the "clean"
> equipment, purity specifications will be needed. This is most
> important for chemicals/material that are not normally used for
> VLSI device fabrication. To be allowed into a "clean" tool
> the material should MOS grade or better.
> * Currently only interested in metrology. *
> 6. * Amount and form. * How much will you bring in? Is it solid,
> powder <http://snf.stanford.edu/Materials/Powders.html> or
> liquid? (Note: as a general rule, powders
> <http://snf.stanford.edu/Materials/Powders.html> are not
> permitted in the cleanroom.) Do you need to mix it to use it?
> *Solid substrate disks, 4" - 8" in diameter.*
> 7. * Storage: * Will you be storing your chemical/material at SNF?
> If so, please note any potential reactivities (this should be on
> the MSDS). Storage groups
> <http://snf.stanford.edu/Materials/StorageGroup.html> A,B,D and
> L are stored in the yellow solvent cabinet in the furnace
> support area, while storage groups
> <http://snf.stanford.edu/Materials/StorageGroup.html> C, E, F
> and G are stored on top of one of the Pass-through Carts. Ensure
> your chemical container or material is properly labeled
> <http://snf.stanford.edu/Materials/ChemLabels.html>. If there is
> no available room, it must be stored by in the bulk storage
> area. You will then need to obtain it from receiving area
> personnel each time you want to use it and return it to them
> when you are finished using it (or each time you leave the lab).
> Note that there is no storage of chemicals/materials in the
> processing lab or at any wet bench.
> * No storage - will be hand carried when needed. Both materials
> can be stored in general storage areas such as warehouses and
> office supply cabinets. *
> 8. * DIsposal * : How will you dispose of any waste or excess
> chemical or material? In your discussions with experts and
> vendors, try to determine the best way to dispose of your spent
> chemicals and by-products. Please refer to the SNF Labmembers
> Safety Manual
> <http://snf.stanford.edu/Labmembers/Labmembers.html> for the
> different methods of waste disposal that are available in the
> *Breakage is not foreseen, since both materials are tough, but
> if there is breakage, I will treat is the same as broken silicon
> and bag it for disposal in the Sharps box.*
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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