Request regarding WbDiff

Ritesh Jhaveri riteshj at ee.ucla.edu
Thu Aug 25 15:27:51 PDT 2005


Hello,
	I have wafers which have gone thru  AMTetcher - LAMpoly -
AMTetcher - wbnonmetal (to remove PR). I plan to into tylan nitride next.
During diffusion clean, I cannot go into HF (due to very thin gate oxides
under the gate) and I do not want to oxidise the rest of the exposed
silicon by dipping in H2O2:HCl clean. Is there some way to use
tylannitride by using only piranha clean in wbdiff, or is there another
way ?
thank you,
Ritesh J




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