[Fwd: Request regarding WbDiff]
Mary Tang
mtang at snf.stanford.edu
Thu Aug 25 16:03:14 PDT 2005
Hi all --
Ritesh asked this question and I asked him to email SpecMat. My two
cents' -- I've no problem with losing the HF dip, but am a little
uncomfortable about dispensing with the HCL dip... I wonder... is
there is actually any more oxidation of silicon following two piranha
cleans than there is following a 5:1:1 H2O:HCl:H2O2 dip? Does anyone
know? Think it's worth asking Ritesh to check?
Mary
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu
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Subject: Request regarding WbDiff
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