mtang at stanford.edu
Fri Dec 2 16:27:12 PST 2005
Why not "Clean" as a starting material, and cover all bases?
Quoting Chris Kenney <kenney at slac.stanford.edu>:
> Dear SpecMat,
> I would like these diamond samples approved as "Semi-clean".
> 1) Contact info
> Chris Kenney
> Coral: kenney
> Phone: 725-3661
> 2) Material
> Carbon in diamond form
> Biocompatible and nonflammable
> World's most pure diamond samples. Electronic grade.
> 3) Vendor
> Element Six (De Beers)
> King's Ride Park, Ascot, UK
> 4) Reasons
> Radiation hard, low Z, good thermal conductivity
> 5) Process
> Wet cleans probably at WBGENERAL with personal quartzware.
> Annealing up to 700C for now using Tylan 3
> Oxygen plasma using Dryteks
> Optical Litho using Karl Suss
> Metal deposition(Ti, Cr, Au, Pt, Al) using Innotec or Metalica
> I would like this classified as "Semi-clean" for now.
> The contaminants are:
> some hydrogen
> 10 ppm of Nitrogen
> < 1 ppm of Boron
> no other significant contaminants
> these are special ultra-pure diamonds
> stable to over 1100 C - highest meltling point of any material
> Once I put metal down it will of course be "Gold" contaminated
> and handled accordingly.
> Equipment to be used:
> karl suss
> 6) Amount
> Chips with dimensions of about: 5mm x 5mm x 0.3mm (very solid)
> 7) Storage
> I'll remove the material when not processing it.
> 8) Disposal
> When finished I'll remove the diamond from the fab.
> Please ask if you have any questions about this.
> Thanks for your time,
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