Yb in Innotec

[Ed Myers]

Carl,

As you are aware, we do allow Yb deposition in the Innotec upon 
request.  Thank you for keeping SpecMat informed of your planned 
depositions.  Just make sure you have a sufficient capping layer.

Regards,



At 05:23 PM 12/8/2005, you wrote:
>Ed,
>
>I have two slots in the Innotec next week and if I can develop our process
>on one of the RTAs that is working, I would like to run another Yb
>deposition (NOTE - the YB will not be going into the RTA).  As always, my
>Yb source is in a liner - for my protection (and of course SNF's as well),
>I will be capping with Ti or Al.  All further processing will be done in
>my labware at the general wetbench.
>
>Do you think this might be possible?
>
>Carl