Yb in Innotec

Ed Myers edmyers at stanford.edu
Fri Dec 9 09:00:38 PST 2005


Carl,

As you are aware, we do allow Yb deposition in the Innotec upon 
request.  Thank you for keeping SpecMat informed of your planned 
depositions.  Just make sure you have a sufficient capping layer.

Regards,



At 05:23 PM 12/8/2005, you wrote:
>Ed,
>
>I have two slots in the Innotec next week and if I can develop our process
>on one of the RTAs that is working, I would like to run another Yb
>deposition (NOTE - the YB will not be going into the RTA).  As always, my
>Yb source is in a liner - for my protection (and of course SNF's as well),
>I will be capping with Ti or Al.  All further processing will be done in
>my labware at the general wetbench.
>
>Do you think this might be possible?
>
>Carl






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