Rhett Brewer: Request for Process approval

Ed Myers edmyers at stanford.edu
Mon Feb 7 10:06:21 PST 2005

I met with Rhett on Friday and he outlined his process flow.  He is anxious 
to get his pathway cleared so he can resume processing once the ALD system 
is back on line.

1) The wafer will come in to the fab with a third party Pd/Si/O layer.
*Rhett is running TXRF on these wafer to verify the level of cleanliness.

2) Poly Deposition: Wafer will have exposed ALD layer covering Pd/Si/O.
*Where can these wafer be deposited?
*Choices are Tystar or Thermco Poly.
*What is required pre-clean and where can it be done?

3) P5000 – Poly etch chamber, Al etch chamber:  Poly etch stopping on ALD 
*Is etching in P5000 allowed?

3) Tylan tube furnace for annealing (whichever is appropriate – I assume 
tylanfga) at 400C and 600 – 800 C (this temp not yet determined, but will 
be in that range).
The open areas of Pd/Si/O layer will be removed before anneal.  Anneal may 
be done here, or moved to later in the process.
*Allowed in FGA tube and what is required pre-plean?

4) Tylanpsg for LTO deposition.  400C.  Exposed surfaces will be Si 
substrate and poly
*Allowed in LTO and what is required pre-clean and where?

5) Tylan furnace tube option for LTO densification and possibly #3) 
annealing step.
*Required pre-clean and where?

6) AMT 8110 or Drytek. LTO etch stopping on silicon or poly
*I don't see any concern

7) Resist strip: Gasonics, Piranha and / or PRX
*Need to resolve PRX and Semiclean B compatibility

8) Gryphon or SCT for metallization:
*What and where is required pre-metal clean

9) P500 metal etch:  Stopping on LTO
*I don't see a problem

10) <http://snf.stanford.edu/Equipment/ag4108/ag4108.html>AG4108 Rapid 
Thermal Annealer (Semi-Clean Mode) 600-800C
*Temperature seems too high for aluminum metallization
*What and where is required preclean.


>From: "Brewer, Rhett T" <rhett.t.brewer at intel.com>
>To: <specmat at snf.stanford.edu>
>I would like to request formal approval to process a non-standard film in 
>Semi-clean equipment at SNF or determine experiments I need to run to gain 
>approval or find alternative processing solutions.  I would like to begin 
>processing in the next two weeks if at all possible.
>The film in question is composed of silicon, oxygen, and palladium (Pd) on 
>a standard 4 inch silicon wafer.  In this film, there is no more than 4 to 
>5 monolayers worth of Pd and it may exist as silicide, metal, or 
>oxide.  This wafer will also have an Al2O3 film on it.
>I would like to process this film stack in the following tools at the 
>specified temperatures when applicable:
>P5000 – Poly etch chamber, Al etch chamber
>Tylan tube furnace for annealing (whichever is appropriate – I assume 
>tylanfga) at 400C and 600 – 800 C (this temp not yet determined, but will 
>be in that range).
>Tylanpsg for LTO deposition.  400C.
>AMT 8110
>Drytek 100
>Gryphon or STC (Do I have that correct?  The new machine run by Ed Myers) 
>for metal deposition.
><http://snf.stanford.edu/Equipment/ag4108/ag4108.html>AG4108 Rapid Thermal 
>Annealer (Semi-Clean Mode) 600-800C
>Additionally, I would like to request the ability to clean the wafers in 
>an appropriate wet bench (wbsilicide?)  The wafers will have to be cleaned 
>at several steps to strip resist and prepare them for entry into these 
>“semi-clean” tools.
>Finally, I would like to coat this wafer with poly.  The tystar is the 
>perfect tool (I believe it is both semi-clean and can deposit doped poly), 
>but I understand it is going away.  I would like the ability to put down 
>either n-doped or undoped poly at up to 600C (I expect it will be 
>580C).  I will say that during this process, the silicon, oxygen, 
>palladium film will be completely covered with Al2O3 (>10 nm).  The Al2O3 
>will either be grown at SNF (new ALD chamber) or by an outside vendor.  In 
>either case, before a wafer is introduced into the poly chamber from 
>either the ALD or an outside vendor, I will check a test wafer with TXRF 
>for contaminants.
>Eventually, the Al2O3 may be replaced by another high-k (HfO2 maybe).  I 
>just wanted to make you aware of that, but it is not urgent.
>I would appreciate a timely response.  I would be happy to meet to answer 
>questions to clarify process and give any information that is appropriate 
>to ensure the compatibility of my process with the needs of the lab.
>Thank you.
>Rhett Brewer
>Intel Corporation
>work: 408-765-8254
>cell: 408-655-3448
><mailto:rhett.t.brewer at intel.com>rhett.t.brewer at intel.com

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