LaB6 in the Innotec

[Carl Faulkner]

I would like to deposit LaB6 (Lanthanum Hexaboride) in the Innotec possibly 
anneal it in the gold-contaminated Tylan.

I will be using pellets in a graphite liner as the source.  I haven't 
located the vapor pressure of the compound, but it has a melting 
temperature over 2000C and both La and B have better vapor pressures than 
Indium.

It is commonly used in the SEM tips.  It has been investigate by Freescale 
Semiconductor as a possible gate material (IEDM 2004), heated to 800C 
without problem on oxide.

Carl Faulkner
cmfaulkn
650 387-3714