NiV 93%/7% sputter targets in metallica
Dr. Alan Mark Myers
amyers at stanford.edu
Thu Feb 10 12:38:54 PST 2005
Today I was busted for using a NiV target in metallica. The reason Ni
is banned from metallica is that it is a magnectic material and the
magnetic field from the magnetron can not permeate the target to form the
characteristic high density plasma associated with magnetron sputtering.
When 7% Vanadium is added to the Ni, the magnetism of the target is
quenched and sputtering works fine. The URL below shows that this is a
standard material for DC magnetron sputtering.
Please let me know if you need any further infor mation regarding this
More information about the specmat