Etch to Cu in PQuest ?

Jim McVittie mcvittie at
Fri Feb 11 14:15:34 PST 2005


I agree that the amont of Cu etched will be pretty small. I am first
checking with some of the key GaAs users of the tool. If it is ok with
them, I will check with all the PQuest users.


jim kruger wrote:

> Jim,
> Would it be permitted to etch sputtered SiN (500 A) to
> stop on Cu (1000 A, on Thermal SiO2/ Si) in PQuest?
> The etch chemistry is based on the GaAs recipe, 2
> mTorr, Ar15, BCl3 5, Cl2 10 with 200 watts uWave and
> 40 watts RF for 45 or 50 volts DC bias.
> The etch mask is ZEP 520a e-beam resist, with sub
> 100nm critical dimensions - aiming for very small
> pattern transfer.
> The open area etching to Cu is only ~ 1% of the ~2x2
> cm chip mounted on a 4inch Si carrier wafer with a
> high vac compatible electron microscope Carbon
> adhesive dot.
> Since the area is so small, the bias is so low, and
> the Cu would be exposed only in over-etch, little Cu
> would be left in the chamber, certainly less than
> exposed when others are using approved covered copper
> tape in the Pquest.
> jimkruger
> Mark Wendman
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