SU-8

[Seung Bum Rim]

Dear specmat,

I'll try to use SU-8 in litho (coating and developing) processing.
After solidifying it, I'll use it with
metal evaporation(innotec),
dry etch(drytek2 and mrc) processing and
wet etch(wet benches) processing.
Can SU-8 be used in those areas?

Thanks,
Seung Rim
Electrical Engineering
Stanford University