SU-8

Seung Bum Rim srim at stanford.edu
Tue Feb 22 16:54:19 PST 2005


Dear specmat,

I'll try to use SU-8 in litho (coating and developing) processing.
After solidifying it, I'll use it with
metal evaporation(innotec),
dry etch(drytek2 and mrc) processing and
wet etch(wet benches) processing.
Can SU-8 be used in those areas?

Thanks,
Seung Rim
Electrical Engineering
Stanford University



More information about the specmat mailing list