Seung Bum Rim srim at
Tue Feb 22 16:54:19 PST 2005

Dear specmat,

I'll try to use SU-8 in litho (coating and developing) processing.
After solidifying it, I'll use it with
metal evaporation(innotec),
dry etch(drytek2 and mrc) processing and
wet etch(wet benches) processing.
Can SU-8 be used in those areas?

Seung Rim
Electrical Engineering
Stanford University

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