Cleaning for tylanfga

Gloria Man Ting Wong gloriamt at stanford.edu
Sun Feb 27 14:52:06 PST 2005


Hi,

What is the proper procedure for cleaning before tylanfga?  My films have Nb
and W on them (and have only been through semi-clean equipment), and I am
not sure if they have been approved for cleaning in wbmetal.

Also, for wafers that must leave the cleanroom for electrical measurements,
can they be returned to the cleanroom for processing in tylanfga?

Thanks,
Gloria



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