Fwd: SCT Tungsten and Niobium
edmyers at stanford.edu
Wed Jan 5 07:43:31 PST 2005
Gloria is requesting Niobium deposition in the SCT. I've asked her to make
a formal request to the committee. Tungsten is already an approved metal.
>X-Sieve: CMU Sieve 2.2
>Delivered-To: emyers at snf.stanford.edu
>Date: Tue, 4 Jan 2005 18:43:55 -0800
>From: Gloria Man Ting Wong <gloriamt at stanford.edu>
>To: emyers at snf.stanford.edu
>Subject: SCT Tungsten and Niobium
>User-Agent: Internet Messaging Program (IMP) 3.2.5
>Happy New Year! With the new year brings (finally) my need to use the SCT
>sputtering system for tungsten and niobium. Do you have time to train me
>on this? I need careful control of the layer thicknesses, so will be
>confirming thicknesses across the wafer with x-ray diffraction.
>Please let me know when would be convenient to meet. Also, will I need to
>purchase a niobium target?
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