Fwd: SCT Tungsten and Niobium

Ed Myers edmyers at stanford.edu
Wed Jan 5 07:43:31 PST 2005

Committee members,

Gloria is requesting Niobium deposition in the SCT.  I've asked her to make 
a formal request to the committee.  Tungsten is already an approved metal.


>X-Sieve: CMU Sieve 2.2
>Delivered-To: emyers at snf.stanford.edu
>Date: Tue,  4 Jan 2005 18:43:55 -0800
>From: Gloria Man Ting Wong <gloriamt at stanford.edu>
>To: emyers at snf.stanford.edu
>Subject: SCT Tungsten and Niobium
>User-Agent: Internet Messaging Program (IMP) 3.2.5
>X-Authenticated-User: gloriamt
>Happy New Year!  With the new year brings (finally) my need to use the SCT
>sputtering system for tungsten and niobium.  Do you have time to train me
>on this?  I need careful control of the layer thicknesses, so will be
>confirming thicknesses across the wafer with x-ray diffraction.
>Please let me know when would be convenient to meet.  Also, will I need to
>purchase a niobium target?

More information about the specmat mailing list