New chemical approval request : Poly(styrene-b-methyl methacrylate)

Li-Wen Chang lwchang at stanford.edu
Tue Jan 11 01:57:30 PST 2005


Dear sirs:
I have a request for approving a new chemical : Poly(styrene-b-methyl methacrylate) which is a kind of diblock copolymer.(PS:PMMA).
Please review the following information.
Tks.


1. Requestor name: Li-Wen Chang

2. Phone number: 650-387-6139

3. email address: lwchang at stanford.edu

4. Requestor’s PI (Advisor) or Company: 
  H.-S. Philip Wong
  Center for Integrated Systems, CISX 312
  Stanford University, Stanford, CA 94305.
  Phone: +1-650-725-0982
  Fax: +1-650-725-7731
  Mobile: +1-650-353-0796
  Email: hspwong at stanford.edu 
5. The name of the new Chemical (give all names commonly used): 
  Poly(styrene-b-methyl methacrylate)
6. If there are secondary new chemicals that must be used with this material, such as a developer for a new resist, list each of them here and supply MSDSs for each of them. 
  N/A.
7. Name of vendor/manufacturer that you are planning to obtain this material from: 
  Polymer Source Inc.
8. URL for vendor’s website where info on the proposed chemical can be found: 
  http://www.polymersource.com/shoppingCart/product.asp?ID=408

9. Vendor’s address and phone number: 
  124 Avro Street 
  Dorval (Montreal), Quebec H9P 2X8
  Canada
  Toll Free: 1-866-422-9842
  Telephone: 514-421-5517 or 5506
  Fax: 514-421-5518

  E-mail: contact at polymersource.com


10. What is your reason for wanting to bring this material into the lab: 
  Quantitative investigation of lithographic subdivision using self-assembly diblock copolymer

11. Make a strong case why you can not use an already approved chemical/material for this purpose: 
  Poly(styrene-b-methyl methacrylate) has self-assembly property and has the potential to integrate to semiconductor process. We want to explore the process space of self-assembly Poly(styrene-b-methyl methacrylate).
(Note that all previously approved chemicals are listed in the MSDS Index binder located in the receiving area. Also see SNF Index of MSDS Sheets.)

12. List all the lab equipment and wet benches that you propose to use with this chemical: 
  Optical Photolithography Resist Coat - Headway Coater . Exposure - Karl Suss MA-6 Contact Aligner . 
  Annealing Furnaces  - Tylan Forming Gas Anneal . 
  Wet Benches - General Use Wet Bench (wbgeneral) ; Solvent Wet Bench . 
  In-Line Process Characterization AFM Nanoscope Dimension ; Rudolph Ellipsometer ; SEM Hitachi Model S-800 

13. Proposed quantity of the chemical that you want to bring into lab (give both raw and mixed quantities): 
  Mixed quantities : approximate 200ml . (The raw material is in the form of powders and is not permitted in the cleanroom.)
14. State the form that the proposed chemical is in. (Is it solid, powder or liquid? Note: as a general rule, powders are not permitted in the cleanroom.): 
  powders

15. State whether the chemical needed to be mixed to use it: 
  To mix up the powders using toluene into a solution.(Need access to a chemicals handling bench.)

16. From manufacturer, vendor or the Stanford safety site, obtain a legible Material Safety Data Sheet (MSDS) for all the proposed chemicals. Send these to the person listed below. 
  As attached files. (SMMA)

17. If the chemical/material is to be used in any the "clean" equipment, purity specifications will be needed. This is most important for chemicals/material that are not normally used for VLSI device fabrication. To be allowed into a "clean" tool, the material should MOS grade or better. 

18. Read the MSDSs as well as the Stanford Chemical Storage Groups and the Stanford Chemical Safety Data Base sections on this website to determine the Storage Group Identifier and Main Hazard Class of your chemical/material. 
  L Solvents, Flammables, and Combustible Materials. Main hazard class : 0.
19. Determine whether there is enough room to store your material in the designed lab storage areas. Storage groups A,B,D and L are stored in the yellow solvent cabinet in the furnace support area, while storage groups C, E, F and G are stored on top of one of the Pass-through Carts. Ensure your chemical container or material is properly labeled. If there is no available room, it must be stored by in the bulk storage area. You will then need to obtain it from receiving area personnel each time you want to use it and return it to them when you are finished using it (or each time you leave the lab). Note that there is no storage of chemicals/materials in the processing lab or at any wet bench. 
  Stored in the yellow solvent cabinet.
20. In your discussions with vendors, try to determine the best way to dispose of your spent chemicals and by-products. The lab has acid/base, HF and solvent drains. The acid/base drains go to a neutralization system before going the city waste water system. The city of Palo Alto has tight limits on the amount of heavy metals that be disposed of through the waste water system. If your chemical contains any metals, there is a good chance that you will have to collect all your waste and dispose of it in labeled containers which are picked up the Health and Safety Department. The HF drains go to a central tank which is pumped out by a HF disposal service at considerable expense on a regular basis. The solvent drains in the solvent benches are collected under the benches and disposed of by Heath and Safety as needed. 
  APPROPRIATE METHOD OF DISPOSAL OF SUBSTANCE OR PREPARATION

  Contact a licensed professional waste disposal service to dispose

  of this material. Dissolve or mix the material with a combustible

  solvent and burn in a chemical incinerator equipped with an

  after burner and scrubber. Observe all federal, state, and local

  environmental regulations.

21. Put together a detailed process flow description on how you proposed to use this chemical. This should include: Any chemical mixing, all lab equipment and wet benched to be used, all containers to be used, where chemical is to be stored and how chemical and by-products are to be deposed of. This should be in a Word file attached to your e-mail request. In reviewing your procedure, we will be most interested in how the safety and contamination issues are to be dealt with. 
  As attached file. (flow)
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