Request to process LaAlO3 inside SNF

Chui, Chi On chi.on.chui at intel.com
Tue Jan 11 09:57:39 PST 2005


Dear All,

 

I'm the Intel Researcher-in-Residence in SNF. I have some film stacks of ~1000 Å Al/~50 Å LaAlO3/Si and would like to perform some FGA in tylanfga (in addition to standard litho). Could I anneal them in the backside of the furnace?

 

Thanks in advance!

 

/Chi On

 

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