Co and Mn

Jim McVittie mcvittie at cis.Stanford.EDU
Wed Jan 12 14:56:14 PST 2005


Hongjie,

See note below from Eric about using Metalica for sputtering Co. It does 
not sound like we would want to try it again.

	Jim 

On Wed, 12 Jan 2005, Eric Perozziello wrote:

> 
> Hi Jim,
> 
> Way back when metalica was an orphan (~1995).
> 
> I don't recommend it.  We had to thin it down to
> almost a foil, and only got a few thin deps from it.
> 
> It arcs and spits, and can eventually overheat the magnets.
> US, Inc says these guns were not designed for stong
> ferromagnetic materials.
> 
> -Eric
> 
> 
> 
> On Wed, 12 Jan 2005, Jim McVittie wrote:
> 
> > Eric,
> >
> > I believe you told me that you had run Co in the Metalica in the past. Is
> > this correct? Also what was the target thickness.
> >
> > 	Thanks,  Jim
> >
> > On Wed, 12 Jan 2005, Jim McVittie wrote:
> >
> > > Hongjie,
> > >
> > > Mn and Co have vapor pressures below In so there is not a vapor pressure
> > > problem. There are both metals which is consistent with the general use of
> > > the tool. Co has a health risk level of 3 which is the same as Cr and Ni,
> > > while Mn has a health risk level of 0. I believe Co has been used in
> > > Metalica in the past. The main issue with Co is that is magnetic material
> > > which means it will tend to shut the magnetic fields from the magnitron
> > > magnets. This means the target thickness needs to be kept thin. Let me
> > > find out what target thickness was used in the past. Regarding Mn, I do
> > > not see any problems.
> > >
> > > I am copying Specmat to see if anyone on the materials committee has any
> > > comments.
> > >
> > > 	Jim
> > >
> > > On Tue, 11 Jan 2005, Hongjie Dai wrote:
> > >
> > > >
> > > > Jim,
> > > >
> > > > Is it ok to deposit Mn and Co in Metallica?  If so, we will order some targets
> > > >
> > > > Thanks, Hongjie
> > > >
> > > >
> > > > ====================================
> > > > Professor Hongjie Dai
> > > > Stanford University
> > > > Department of Chemistry
> > > > Stanford, CA 94305
> > > >
> > > > Phone: 650-723-4518 (office); 650-725-9156 (lab)
> > > > Fax:     650-725-0259
> > > > Email:  hdai or hdai1 at stanford.edu
> > > > Office: Keck Science Building, Room 125
> > > > ====================================
> > > >
> > > >
> > >
> > >
> >
> > --
> > --------------------------------------------------------------
> > Jim McVittie, Ph.D.    			Senior Research Scientist
> > Allen Center for Integrated Systems     Electrical Engineering
> > Stanford University             	jmcvittie at stanford.edu
> > Rm. 336, 330 Serra Mall			Fax: (650) 723-4659
> > Stanford, CA 94305-4075			Tel: (650) 725-3640
> >
> >
> >
> 
> 

-- 
--------------------------------------------------------------
Jim McVittie, Ph.D.    			Senior Research Scientist 
Allen Center for Integrated Systems     Electrical Engineering
Stanford University             	jmcvittie at stanford.edu
Rm. 336, 330 Serra Mall			Fax: (650) 723-4659
Stanford, CA 94305-4075			Tel: (650) 725-3640





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