Co and Mn

Hongjie Dai hdai1 at stanford.edu
Wed Jan 12 16:04:18 PST 2005


Jim, we will be only depositing no more than 5 nm of Co and will use thin 
foils.  Would this be allowed?

Hongjie

At 02:56 PM 1/12/2005, Jim McVittie wrote:
>Hongjie,
>
>See note below from Eric about using Metalica for sputtering Co. It does
>not sound like we would want to try it again.
>
>         Jim
>
>On Wed, 12 Jan 2005, Eric Perozziello wrote:
>
> >
> > Hi Jim,
> >
> > Way back when metalica was an orphan (~1995).
> >
> > I don't recommend it.  We had to thin it down to
> > almost a foil, and only got a few thin deps from it.
> >
> > It arcs and spits, and can eventually overheat the magnets.
> > US, Inc says these guns were not designed for stong
> > ferromagnetic materials.
> >
> > -Eric
> >
> >
> >
> > On Wed, 12 Jan 2005, Jim McVittie wrote:
> >
> > > Eric,
> > >
> > > I believe you told me that you had run Co in the Metalica in the past. Is
> > > this correct? Also what was the target thickness.
> > >
> > >     Thanks,  Jim
> > >
> > > On Wed, 12 Jan 2005, Jim McVittie wrote:
> > >
> > > > Hongjie,
> > > >
> > > > Mn and Co have vapor pressures below In so there is not a vapor 
> pressure
> > > > problem. There are both metals which is consistent with the general 
> use of
> > > > the tool. Co has a health risk level of 3 which is the same as Cr 
> and Ni,
> > > > while Mn has a health risk level of 0. I believe Co has been used in
> > > > Metalica in the past. The main issue with Co is that is magnetic 
> material
> > > > which means it will tend to shut the magnetic fields from the magnitron
> > > > magnets. This means the target thickness needs to be kept thin. Let me
> > > > find out what target thickness was used in the past. Regarding Mn, I do
> > > > not see any problems.
> > > >
> > > > I am copying Specmat to see if anyone on the materials committee 
> has any
> > > > comments.
> > > >
> > > >   Jim
> > > >
> > > > On Tue, 11 Jan 2005, Hongjie Dai wrote:
> > > >
> > > > >
> > > > > Jim,
> > > > >
> > > > > Is it ok to deposit Mn and Co in Metallica?  If so, we will order 
> some targets
> > > > >
> > > > > Thanks, Hongjie
> > > > >
> > > > >
> > > > > ====================================
> > > > > Professor Hongjie Dai
> > > > > Stanford University
> > > > > Department of Chemistry
> > > > > Stanford, CA 94305
> > > > >
> > > > > Phone: 650-723-4518 (office); 650-725-9156 (lab)
> > > > > Fax:     650-725-0259
> > > > > Email:  hdai or hdai1 at stanford.edu
> > > > > Office: Keck Science Building, Room 125
> > > > > ====================================
> > > > >
> > > > >
> > > >
> > > >
> > >
> > > --
> > > --------------------------------------------------------------
> > > Jim McVittie, Ph.D.                         Senior Research Scientist
> > > Allen Center for Integrated Systems     Electrical Engineering
> > > Stanford University                 jmcvittie at stanford.edu
> > > Rm. 336, 330 Serra Mall                     Fax: (650) 723-4659
> > > Stanford, CA 94305-4075                     Tel: (650) 725-3640
> > >
> > >
> > >
> >
> >
>
>--
>--------------------------------------------------------------
>Jim McVittie, Ph.D.                     Senior Research Scientist
>Allen Center for Integrated Systems     Electrical Engineering
>Stanford University                     jmcvittie at stanford.edu
>Rm. 336, 330 Serra Mall                 Fax: (650) 723-4659
>Stanford, CA 94305-4075                 Tel: (650) 725-3640

====================================
Professor Hongjie Dai
Stanford University
Department of Chemistry
Stanford, CA 94305

Phone: 650-723-4518 (office); 650-725-9156 (lab)
Fax:     650-725-0259
Email:  hdai or hdai1 at stanford.edu
Office: Keck Science Building, Room 125
==================================== 




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