Nb target in SCT

Michael Deal mdeal at stanford.edu
Thu Jan 13 10:20:32 PST 2005


Approve it.    -mike

At 10:17 AM 1/13/2005, you wrote:
>Ed,
>
>Here is some info on Nb.
>
>Its safety ratings are: Health - 0, Flammability - 4, Reactivity - 0
>   Cr, Ti and Zr also have a flammability rating of 4.
>
>The Sloan technical notes say that it can be sputtered with either dc or rf.
>
>Nb has a very low vapor pressure. On the RCA 1B curve it is the 3rd below W.
>
>My sources do not list any deep levels for Nb, so it is not a known bad actor
>in Si.
>
>     Jim
>
>
>
>Ed Myers wrote:
>
> > Gloria,
> >
> > Do you have written confirmation from the SpecMat committee concerning Nb
> > deposition in the SCT?  I don't remember seeing a Nb proposal since I've
> > been involved.  I can look in to the purchase cost of the target, but no Nb
> > deposition will be allowed unless you have written approved by the SpecMat
> > committee.
> >
> > Ed
> >
> > At 09:13 AM 1/13/2005, Jim McVittie wrote:
> > >Gloria,
> > >
> > >I have not ordered a target. At this point, I think it would be best to
> > >have Ed order the target. In the past, the lab paid for targets only if
> > >several groups requested it. The cost of a 2" x 0.125" target from Lesker
> > >is $585. While the tool should be able to take 0,125" thick targets, it is
> > >actually set up to take 0.250" targets. I expect the 0.250" target from
> > >Lester will be about $1000. I purchased all the previous targets from
> > >Plasma Materials which had better prices and purity than Lesker.
> > >
> > >We can check with the Nishi and Saraswat groups to sdee if they need Nb.
> > >
> > >         Jim
> > >
> > >On Wed, 12 Jan 2005, Gloria Wong wrote:
> > >
> > > > Hi Jim,
> > > >
> > > > What is the status of the Nb target in the SCT?  I recall that you and
> > > Mike okayed it for use in the SCT, but I can't remember if you were
> > > planning on ordering it, or if I should be looking into that.
> > > >
> > > > Please let me know because after training on Friday, I would like to
> > > starting depositing W and Nb.
> > > >
> > > > Thanks,
> > > > Gloria
> > > >
> > >
> > >--
> > >--------------------------------------------------------------
> > >Jim McVittie, Ph.D.                     Senior Research Scientist
> > >Allen Center for Integrated Systems     Electrical Engineering
> > >Stanford University                     jmcvittie at stanford.edu
> > >Rm. 336, 330 Serra Mall                 Fax: (650) 723-4659
> > >Stanford, CA 94305-4075                 Tel: (650) 725-3640




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