specmat meeting 1/18/05
rissman at stanford.edu
Tue Jan 18 13:37:27 PST 2005
Attending - Mike, Ed, Mahnaz, Mary, Paul
Absent - Jim, John
1. Gloria Wong - niobium (class semiclean b) - deposition has been
approved, RTP has been approved, etch requires approval of Jim.
2. Peter Griffin - GaAs RTP - RTP to be limited to hooded/exhausted RTP
system. That system to be limited to maximum temperature of 800 C. No
GaAs in system which is not hooded/exhausted. (Dick's group is presently
providing forming gas to the system.)
3. HBr/gold etchant/methane sulfonic acid - is there an issue with storage
with oxidizing acids? - Mary to check with Mary Dougherty.
4. Hongjie Dai - cobalt/manganese sputtering - issue open
notes: John - Ed needs to be added to specmat list.
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