[Fwd: thin film vendors]

Mary Tang mtang at snf.stanford.edu
Wed Jan 19 14:14:53 PST 2005

Hi all --

I'm not sure this is a SpecMat request yet, but just wanted to get your 
thinking on this...  Can we consider Process Specialties as being 
"clean", like the way we do IBM and Intel?


-------- Original Message --------
Subject: 	thin film vendors
Date: 	Wed, 19 Jan 2005 13:58:20 -0800 (PST)
From: 	Richard Yeh <richyeh at sbcglobal.net>
To: 	Mary Tang <mtang at snf.stanford.edu>

Hi Mary,

I'm thinking of having some thin-films deposited
(thermal oxide and lpcvd poly) on 4" wafers and
then doing patterning on those wafers at SNF.
Is there a list of approved vendors whose wafers
are allowed into SNF?  Right now, I'm considering
using Process Specialties, Inc.

Richard Yeh
yeh at snf


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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