Addition of Pd to Semiclean B material List
Jim McVittie
mcvittie at cis.Stanford.EDU
Wed Jan 19 15:20:18 PST 2005
Mike,
I was not proposing that we buy a Pd target. I am working with a user, who
be using Pd deposited outside. I just wanted to get Pd on the B list as a
first step to its use.
Jim
On Wed, 19 Jan 2005, Michael Deal wrote:
>
> Jim,
> Who is going to pay for this? -mike
>
> At 01:43 PM 1/19/2005, Jim McVittie wrote:
> >I would to add palladium, Pd, to the Semiclean B material List.
> >
> >Pd is very similar to Pt. Its safety ratings are all 0s. Its vapor
> >pressure curve is next to gold. It has a deep level of 0.34 eV which is
> >the same as Mo. It is relatively expense material with the Lesker price
> >for a 2" target being $1400.
> >
> > Thanks, Jim
>
>
--
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Jim McVittie, Ph.D. Senior Research Scientist
Allen Center for Integrated Systems Electrical Engineering
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