Implants into GaAs wafers ....

[Michael Deal]

Sounds okay to me (we used to do implants to GaAs wafers here before.  No 
problems.)  -mike

At 03:10 PM 1/21/2005, you wrote:
>Specmat committee:
>
>Mike Weimer would like to do a moderate dose H+ implant into a GaAs 
>partial wafer ... my inclination is that this should be just fine as the 
>potential heating due to the implant beam should be virtually non-existant.
>
>Does anyone have any other concerns related to this?
>
>Thanks,
>
>John