Implants into GaAs wafers ....

Michael Deal mdeal at
Fri Jan 21 15:51:58 PST 2005

Sounds okay to me (we used to do implants to GaAs wafers here before.  No 
problems.)  -mike

At 03:10 PM 1/21/2005, you wrote:
>Specmat committee:
>Mike Weimer would like to do a moderate dose H+ implant into a GaAs 
>partial wafer ... my inclination is that this should be just fine as the 
>potential heating due to the implant beam should be virtually non-existant.
>Does anyone have any other concerns related to this?

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