Implants into GaAs wafers ....
mdeal at stanford.edu
Fri Jan 21 15:51:58 PST 2005
Sounds okay to me (we used to do implants to GaAs wafers here before. No
At 03:10 PM 1/21/2005, you wrote:
>Mike Weimer would like to do a moderate dose H+ implant into a GaAs
>partial wafer ... my inclination is that this should be just fine as the
>potential heating due to the implant beam should be virtually non-existant.
>Does anyone have any other concerns related to this?
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