Fwd: Tystar1 replacemnet

Ed Myers edmyers at stanford.edu
Fri Jan 28 16:29:24 PST 2005


>X-Sieve: CMU Sieve 2.2
>Delivered-To: emyers at snf.stanford.edu
>From: "Abhijit Pethe" <pethe at stanford.edu>
>To: "'Mary Tang'" <mtang at snf.stanford.edu>
>Cc: <emyers at snf.stanford.edu>, "'Jim McVittie'" <mcvittie at cis.Stanford.EDU>,
>         "'Michael Deal'" <mdeal at stanford.edu>
>Subject: Tystar1 replacemnet
>Date: Thu, 27 Jan 2005 17:47:06 -0800
>X-Mailer: Microsoft Outlook, Build 10.0.4510
>Importance: Normal
>
>Hi,
>
>I have been using the tystar1 for doing my low-temperature doped poly 
>processes on my clean Ge (silicide and semiclean B process) wafers. I 
>nominally do an n+poly deposition of about 3000A at 580C followed by 2x 
>deposition of undoped poly at 620C (~1um). Will there be an alternative 
>tube where I could do this processing?
>
>Please let me know,
>Abhijit
>
>Abhijit Jayant Pethe
>PhD Candidate
>Department of Electrical Engineering
>Stanford University, CA
>Phone :(O)(650)-725-3608; (C) (650)-387-6435
>e-mail: <mailto:pethe at stanford.edu>pethe at stanford.edu
>





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