Process

Ching-Huang Lu ratiug at stanford.edu
Mon Jan 31 21:54:57 PST 2005


Hi, 

Here is the process flow for use of the metal from SCT. Basically, all the process is clean before SCT metal deposition and semi-clean after SCT metal deposition.

Please let me know if there is anything needed to modified.

thanks.

Ching-Huang

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