Fwd: Pt-Ir Targets for Metalica

Ed Myers edmyers at stanford.edu
Tue Jul 26 08:11:36 PDT 2005


Yesterday Mario pointed out, I missed including this request during our 
last specmat meeting.  Mario has the targets and is waiting for specmat's 

 From the sputtering point of view, there should not be any problems.  My 
only concern, as Mary pointed out is the toxicity of the conducting oxides 
(Ru, Ir, Os and Rh) in the O4 state.  From what I remember Os and Ir are 
the most toxic.  The more stable form are the O2 states, meaning you have 
to force the materials in to the O4 state.  From a practical point I ran a 
Ru/RuO2 process for 4 years and Elmer and I are still here to talk about it.

One limitation could be requiring lift-off instead of sputter etching in 
the MRC.


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>Subject: Pt-Ir Targets for Metalica
>Date: Thu, 14 Jul 2005 15:56:22 -0700
>Thread-Topic: Pt-Ir Targets for Metalica
>Thread-Index: AcWIx0D23fmEvd7pT3aWKvTntYGdDw==
>From: "Mario Perez" <mperez at proteusbiomed.com>
>To: <specmat at snf.stanford.edu>
>I would like to use a few different Pt-Ir targets in "Metalica".
>Pt-Ir 90:10 (wt%)
>Pt-Ir 80:20
>Pt-Ir 70:30
>Each target is 1" in diameter and 1/8" thick.
>I plan to do 1,000-2,000A depositions at a time and will store the targets 
>in my own personal storage bin.
>Thank you,
>Mario Perez (mperez)
>MEMS Engineer
>Proteus Biomedical, Inc.
>Direct:  650-568-0580 x116

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