silicone free heatsink compound

Wibool Piyawattanametha wibool at stanford.edu
Wed Jun 15 12:36:00 PDT 2005


Hi John,

 

I will find more info about this paste and get back to you next week.   

 

Thank you.

 

WP

 

Wibool Piyawattanametha, Ph.D.
Stanford University
Departments of Applied Physics, Biological Sciences, and Pediatrics
James H. Clark Center (Bio-X) - Room W080
318 Campus Drive
Stanford, CA 94305
T: (650) 725-4097
F: (650) 724-5805

  _____  

From: John Shott [mailto:shott at snf.stanford.edu] 
Sent: Wednesday, June 15, 2005 11:45 AM
To: Wibool Piyawattanametha
Cc: specmat at snf.stanford.edu
Subject: Re: silicone free heatsink compound

 

Wibool:

If you know other places that are using it, then they may be able to provide
relevant information.  To be most useful, however, it would be useful to
know things like:

1. What sort of tools and under what conditions have they used it?  For
example, it tells us a lot if someone is using it in an "anything goes" type
of tool as opposed to a tool that is used for development of a certain type
of process or applicaitons because that helps to understand how clean (or
dirty) those folks feel that the material is.  Information of this type from
the industrial folks is often useful ... in part because they are often more
cautious about contamination issues and also often expend more resources to
characterize something ...

2. Are there limitations to the use of this material in these places? For
example, do they limit it to certain cleanliness levels?  Or certain power
densities in the plasma? Or require that there be none of this material
directly exposed to the plasma?

3. How do they remove the material from both the machine and the sample
prior to subsequent processing?  We need a mechanism to make sure that this
material doesn't migrate to a bunch of other tools in the lab ... places
like hot pots, furnaces, and LPCVD tubes, in particular ...

In short, we're not interested in doing an evaluation of this material from
scratch and are happy to look at pertinent information from other sources
and learn from their experiences.  However, to be most useful, we need more
specific information and details than simply "They use it at X ..."

Thanks,

John




In fact, I have used this compound in the similar applications at other
institutions e.g. UCLA and UC Berkeley before in a semi-clean STS and Unaxis
DRIE machines there.    The compound is widely accepted and used there.   It
has a much better thermal conduction than PR.    Hence, the side walls
profile are extremely good even in an extremely long time etching. Moreover,
some of my friends who work in the industries and research labs e.g. TRW,
Hughes, Northrop Grumman, Jet Propulsion Lab, etc. have told me that they
have used this compound in their labs as well.

 

 

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