silicone free heatsink compound

Jim McVittie mcvittie at
Fri Jun 17 09:07:28 PDT 2005


Yes, this material has been used as a thermal transfer material between
Si pieces and carrier wafers in plasma etching tools for some time. I
have some of this material and have looked into using it in our lab well
over a year ago. The ZnO is a problem in using it in semiclean tools. If
the ZnO is exposed to a plasma some of it will decompose and will result
in Zn contamination to the tool. Zn has a midgap trap level in Si, which
means it is a major lifetime killer in Si. Applied Materials uses this
material in their plasma etch demo lab but not in their CMOS clean

    Jim McVittie

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