silicone free heatsink compound

Jim McVittie mcvittie at snf.stanford.edu
Fri Jun 17 09:07:28 PDT 2005


Wibool,

Yes, this material has been used as a thermal transfer material between
Si pieces and carrier wafers in plasma etching tools for some time. I
have some of this material and have looked into using it in our lab well
over a year ago. The ZnO is a problem in using it in semiclean tools. If
the ZnO is exposed to a plasma some of it will decompose and will result
in Zn contamination to the tool. Zn has a midgap trap level in Si, which
means it is a major lifetime killer in Si. Applied Materials uses this
material in their plasma etch demo lab but not in their CMOS clean
tools.

    Jim McVittie

Wibool Piyawattanametha wrote:

>    Part 1.1    Type: Plain Text (text/plain)
>            Encoding: 7bit
-------------- next part --------------
A non-text attachment was scrubbed...
Name: mcvittie.vcf
Type: text/x-vcard
Size: 422 bytes
Desc: Card for Jim McVittie
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20050617/a712578d/attachment.vcf>


More information about the specmat mailing list