Laser Annealing outside SNF
mtang at snf.stanford.edu
Thu Mar 3 09:42:09 PST 2005
Hi all --
Bipin is really anxious to get going on this and would like an answer,
as he is trying to determine whether he can send his wafers out for
processing.... I am not sure how, but I think we missed this in our
meeting on Tuesday (at least this wasn't discussed while I was there...)
Was this covered afterward? Mahnaz does not have any notes on this.
My feeling on this is that the risk of cross-contamination in the
gryphon, P5000 and FGA anneal is very low. The only possible risk is at
any of the wet station cleans prior to any of these steps. My suggestion
is that we ask that all cleans be done at wbgeneral in dedicated labware
or at wbsilicide, provided all acids are drained/changed. Does anyone
else have any strong opinions on this?
Bipin Rajendran wrote:
> Dear Specmat Members,
> I am trying to do a modified 410 process, that use laser annealing for
> activating the source drain regions. I am planning to send my wafers
> out to a company called AMBP Tech, and below is an email from them
> telling me about their laser machine.
> My question is this: After I do the annealing, will I be allowed to
> come back to the lab and continue with the remaining 410 processing
> ie. Al deposition in gryphon, P5000 etch and FGA anneal? Or will I
> have to look for alternate set of non-semi-clean equipments to do these?
> AMBP Tech’s core discipline is in thin film equipment and services and
> we have used our thin film equipment, located in the same lab as the
> excimer laser, to deposit various thin films that have been
> subsequently processed in a clean room to yield working devices.
> Our applications laboratory environment is relatively clean (no
> industrial processes are ongoing to produce large amounts of
> particles), but it is not clean room controlled and the processing
> will be done under normal conditions. We have not had any customers
> that have wished to do further processing on the wafers after the
> laser annealing, only material analysis.
> We have laser processed partially gold coated die previously, the
> presence of the gold will not affect our ability to process the
> wafers, though the gold coated part will not absorb many of the 248nm
> photons and phase transformations of the gold or underlying layers of
> the gold will have a phase change affected.
> Thanks very much,
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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