honeywell phos spin on dopant
artyjamo at comcast.net
artyjamo at comcast.net
Thu May 12 15:33:47 PDT 2005
Hi Mary and Spec Mat.
I would like to bring in a small 100 ml eyedropper bottle of this material and store it at SNF. From the MSDS sheet, it is a flammable liquid that would react with strong oxidants, halogens & alkalies. From the Stanford Material storage outline it looks like it should be stored in the left solvent cabinet Shelf 1 Storage group L, but basically I'll store it where you tell me to store it. My plan is to spin the material on Si wafers and hot plate bake it for 1 min at 150 degrees on the hotplates immediatly to the right of the Headway spinner. The 700-1100 degree for 30 seconds/ N2 RTA process would be done in the dirty, left table top RTA's. I need to get with Nancy to determine which bench to use for the BOE strip. For metrology I would like to use the 4 pt probe. For waste disposal, according to the SNF safety manual this can be disposed of in the standard solvent waste, which is located at WBSOLV or LITHOSOLV. It does not contain any Halogens, Halogen functional groups or any of the other prohibited metals or toxins listed in the manual. I'll check with Mahnaz to verify this.
We did get a certificate of purity with this material. It is electronics grade. I'll make a copy of it and bring it to Mahnaz.
-------------- Original message --------------
> Hi Aleta --
> Please provide the relevant information as outlined here:
> (i.e., Do you plan on storing this chemical at SNF? If so, how much and
> for how long? How do you plan to get rid of waste? How long it the
> hotplate bake? And where do you plan to strip it off in BOE? If you
> have purity spec on this (is it electronics grade?), that would be helpful.)
> artyjamo at comcast.net wrote:
> > I would like to ask for approval to bring in a new chemical. it is made by
> Honeywell, and it is a Diffusion technology phosphorus spin on dopant P-8
> Series. The generic name for it is Phosphosilicate polymer in alcohol/ester
> solution. I want to dope some si substrates by spinning this stuff on in
> the Headway spinner. Hotplate baking it at 150 deg, do an RTA @ 700-1100
> degrees in the table top gold contaminated RTA systems, and then strip it off in
> >I gave Mahnaz a copy of the MSDS sheet . I have not been able to get a soft
> copy - sorry
> >-Aleta Jamora
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA 94305
> mtang at stanford.edu
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