New SNF Chemical (1 of 6): Gamma-Methacryloxypropyltrimethoxysilane

Bree Sharratt sharratt at stanford.edu
Wed May 18 12:39:53 PDT 2005


This is the first of 6 new materials requests.  The first 3 and last 2 
materials are all various types of adhesion promoters and the 4th is a 
catalyst.  Here is a list, in email order, of the new materials:

1.	Gamma-Methacryloxypropyltrimethoxysilane (this email)
2.	Gamma-Glycidoxypropyltrimethoxysilane
3.	Gamma-Aminopropyltrimethoxysilane
4.	Propylamine
5.	n-Propyl Titanate
6.	n-Propyl Zirconate

Since these are all being used for the same research project, the 
description of the project and method will not change in subsequent 
emails.  Also note that the reference paper, applicable in method to 
the first four materials, is being attached to emails 1-4 to avoid (I 
hope) confusion.  Please let me know if I need to further explain.

Thanks,
Bree

Contact Information:
Bree Sharratt
coral login: bree
office: 550-555C
office phone: 650 725 2634
mobile phone: 650 283 4835
home phone: 408 252 5545
email: sharratt at stanford.edu
PI: Prof. Reinhold H. Dauskardt (Materials Science & Engineering)

Chemical:
MSDS attached at the bottom of this email.

Chemical name:  Gamma-Methacryloxypropyltrimethoxysilane
Product name:  Silquest A-174 Silane
SYNONYM: 2-Methylpropenoyloxypropyltrimethoxysilane
SYNONYM: 2-Propenoic acid, 2-methyl-, 3-(trimethoxysilyl)propyl ester
SYNONYM: 3-(Trimethoxysilyl)-1-propanol methacrylate
SYNONYM: 3-Methacryloxypropyltrimethoxysilane
SYNONYM: Dynasylan MEMO
SYNONYM: G-METHACRYLOXYPROPYLTRIMETHOXYSILANE
SYNONYM: Methacrylic acid, 3-(trimethoxysilyl)propyl ester
SYNONYM: Silane, (3-hydroxypropyl)trimethoxy-, methacrylate
SYNONYM: Silicone A-174
SYNONYM: Trimethoxysilyl-3-propylester kyseliny methakrylove
SYNONYM: Union carbide A-174
SYNONYM: gamma Methacryloxypropyltrimethoxysilane
SYNONYM: gamma-Methacryloxyproptrimethoxysilane
SYNONYM: gamma-Methacryloxypropyltrimethoxysilane

Components:
Gamma-Methacryloxypropyltrimethoxysilane	CAS# 2530-85-0		>98.0%
Related silanes					   	CAS# not established	<2.0%
Methanol							CAS# 67-56-1		<0.2%

Stanford Chemical Storage Group:  D: Compatible Organic Acids, 
Flammables, and Poisons
Main Hazard Class:	Flammable
Additional Hazards:	Water reactive, Severely toxic, Combustible, 
Corrosive, Acid, Mucous membrane damage

Secondary Chemicals Used with this Chemical:
Methanol
Propylamine (see email 4 of 6)

Supplier Information:
GE Silicones
3500 South State Route 2
Friendly, WV 26146

contact numbers:
CHEMTREC (24 hours)	800 424 9300
GE Silicones Emergency Response (24 hours)	800 809 9998
For product safety inquiries	304 652 8446
For MSDS only			304 652 8155
Customer Service		800 523 5862

Reason for Request:   Please note that this description is repeated in 
subsequent requests!
My experimental work involves exploring the effects of environmental 
factors (temperature, relative humidity) and loading conditions (load 
type, mean stress, frequency) on debonding of SiNx/Epoxy/SiNx sandwich 
specimens.  After observing some interesting behavior, I am 
investigating the effect that interface chemistry has on debonding.  To 
accomplish this I will be spin-coating wafer pieces, which will be 
sectioned from 8 inch Si/SiO2/SiNx wafers (provided by LSI Logic, Inc) 
and etched in 50:1 HF, with 5 different adhesion promoting films.  
These adhesion promoters were specially selected to mimic certain 
functional groups and curing processes observed in other material 
systems.  The following is a list of adhesion promoters that will be 
used in this study (note that the first three are similar to AP3000 and 
AP8000 already certified for use at SNF):

Gamma-Methacryloxypropyltrimethoxysilane
Gamma-Glycidoxypropyltrimethoxysilane
Gamma-Aminopropyltrimethoxysilane
n-Propyl Titanate
n-Propyl Zirconate

The first three adhesion promoters are silanes.  Silane solutions will 
be prepared as follows:  1 part adhesion promoter will be dissolved in 
100 parts deionized water, which will be diluted with 900 parts 
methanol to produce a 0.1 wt% solution.  A few drops of propylamine 
will be added as a catalyst for the hydrolysis reaction (except for 
gamma-aminopropyltrimethoxysilane, which self-catalyzes).  This method 
was used by Maura Jenkins (Stanford PhD 2002) and Jeff Snodgrass 
(Stanford PhD 2001) in preparing wafers with similar adhesion promoter 
films (AP3000 and AP8000) and is documented in "Important factors for 
silane adhesion promoter efficacy: surface coverage, functionality and 
chain length," also attached.

The zirconate and titanate adhesion promoter solutions will be prepared 
to produce a 0.1 wt% solution using n-propanol.  A few drops of water 
may be added to encourage hydrolysis, which will be determined 
iteratively based on the results of the spin-coated film.

Process Flow:
For wafer pieces (Si/thermal SiO2/PECVD SiNx):
	1.	wbsolvent - mix 1 part gamma-methacryloxypropyltrimethoxysilane:100 
part deionized water:900 parts methanol:few drops of propylamine - 
bottle, cap and bag
	2.	wbgeneral - clean wafer pieces in 50:1 HF, water rinse and blow dry 
with N2, box
	3.	transport adhesion promoter solution, in cart, to laurel
	4.	laurel - spin-coat onto wafer pieces
For glass slides (UV ozone cleaned and boxed in 550-553B):
	1.	sts - deposit 200 nm SiNx
	2.	wbsolvent - mix 1 part gamma-methacryloxypropyltrimethoxysilane:100 
part deionized water:900 parts methanol:few drops of propylamine - 
bottle, cap and bag
	3.	transport adhesion promoter solution, in cart, to laure
	4.	laurel - spin-coat onto wafer pieces

Amount and Form:
gamma-methacryloxypropyltrimethoxysilane - 150 mL bottle, liquid form
to be mixed with water, methanol and propylamine

Storage:
Storage group D: Compatible Organic Acids, Flammables, and Poisons
Incompatible with (these may cause hazardous exothermic polymerization 
and/or decomposition): alkalis, metal salts, oxidizing agents, water, 
peroxides and other free radical initiators.

Disposal:
Liquid and solid (gloves, wipes, etc) waste will be collected locally, 
properly labeled and disposed of according procedures that will be 
determined with the safety committee.

Attachments:
1.	MSDS for gamma-methacryloxypropyltrimethoxysilane
2.	ML Jenkins, RH Dauskardt, JC Bravman, "Important factors for silane 
adhesion promoter efficacy: surface coverage, functionality and chain 
length." J Adhsion Sci Technol, 18(13), 1497-1516 (2004).

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