New SNF Chemical (6 of 6): n-propyl zirconate

Bree Sharratt sharratt at stanford.edu
Wed May 18 12:42:01 PDT 2005


This is the 6th of 6 (yay!) new materials requests.  The first 3 and 
last 2 materials are all various types of adhesion promoters and the 
4th is a catalyst.  Here is a list, in email order, of the new 
materials:

1.	Gamma-Methacryloxypropyltrimethoxysilane
2.	Gamma-Glycidoxypropyltrimethoxysilane
3.	Gamma-Aminopropyltrimethoxysilane
4.	Propylamine
5.	n-Propyl Titanate
6.	n-Propyl Zirconate (this email)

Since these are all being used for the same research project, the 
description of the project and method will not change in subsequent 
emails.  The n-propyl titanate and n-propyl zirconate are Tyzor 
products and the general brochure has been included for materials 5 and 
6.  Please let me know if I need to further explain.

Thanks,
Bree

Contact Information:
Bree Sharratt
coral login: bree
office: 550-555C
office phone: 650 725 2634
mobile phone: 650 283 4835
home phone: 408 252 5545
email: sharratt at stanford.edu
PI: Prof. Reinhold H. Dauskardt (Materials Science & Engineering)

Chemical:
MSDS attached at the bottom of this email.

Chemical name:  n-propyl zirconate
Product name:  "Tyzor" NPZ
SYNONYM: Zirconium(IV) propoxide, 70% in 1-propanol
SYNONYM: "Tyzor" NPZ
SYNONYM: Zirconium(IV) propoxide in flammable solvent
SYNONYM: Zirconium(IV) propoxide solution
SYNONYM: Zircon-n-propylate
SYNONYM: Zirconium-Propylate
SYNONYM: Tetrapropoxy zirconium
SYNONYM: Zirconium tetrapropoxide


Components:
zirconium tetrapropanolate	CAS# 23519-77-9	70%
n-propyl alcohol			CAS# 71-23-8		30%

Stanford Chemical Storage Group:  L: Non-Reactive Flammables and 
Combustibles, including solvents
Main Hazard Class:	flammable
Additional Hazards:	flammable, skin irritant, lung irritant, eye 
irritant

Secondary Chemicals Used with this Chemical:
n-propanol

Supplier Information:
DuPont
1007 Market Street
Wilmington, DE 19898

contact:
product info:		800 441 7515
CHEMTREC:		800 424 9300
medical emergency:	800 441 3637	
www.dupont.com/tyzor/

Reason for Request:   Please note that this description is repeated in 
subsequent requests!
My experimental work involves exploring the effects of environmental 
factors (temperature, relative humidity) and loading conditions (load 
type, mean stress, frequency) on debonding of SiNx/Epoxy/SiNx sandwich 
specimens.  After observing some interesting behavior, I am 
investigating the effect that interface chemistry has on debonding.  To 
accomplish this I will be spin-coating wafer pieces, which will be 
sectioned from 8 inch Si/SiO2/SiNx wafers (provided by LSI Logic, Inc) 
and etched in 50:1 HF, with 5 different adhesion promoting films.  
These adhesion promoters were specially selected to mimic certain 
functional groups and curing processes observed in other material 
systems.  The following is a list of adhesion promoters that will be 
used in this study (note that the first three are similar to AP3000 and 
AP8000 already certified for use at SNF):

Gamma-Methacryloxypropyltrimethoxysilane
Gamma-Glycidoxypropyltrimethoxysilane
Gamma-Aminopropyltrimethoxysilane
n-Propyl Titanate
n-Propyl Zirconate

The first three adhesion promoters are silanes.  Silane solutions will 
be stored and prepared in another Stanford lab (Peterson Bldg 550, Rm 
551I) as follows:  1 part adhesion promoter will be dissolved in 100 
parts deionized water, which will be diluted with 900 parts methanol to 
produce a 0.1 wt% solution.  A few drops of propylamine will be added 
as a catalyst for the hydrolysis reaction (except for 
gamma-aminopropyltrimethoxysilane, which self-catalyzes).  This method 
was used by Maura Jenkins (Stanford PhD 2002) and Jeff Snodgrass 
(Stanford PhD 2001) in preparing wafers with similar adhesion promoter 
films (AP3000 and AP8000) and is documented in "Important factors for 
silane adhesion promoter efficacy: surface coverage, functionality and 
chain length," also attached.

The zirconate and titanate adhesion promoter solutions will be prepared 
to produce a 0.1 wt% solution using n-propanol.  A few drops of water 
may be added to encourage hydrolysis, which will be determined 
iteratively based on the results of the spin-coated film.

Process Flow:
For wafer pieces (Si/thermal SiO2/PECVD SiNx):
	1.	wbsolvent - mix 1 part n-propyl zirconate:700 parts n-propanol - 
bottle, cap and bag
	2.	wbgeneral - clean wafer pieces in 50:1 HF, water rinse and blow dry 
with N2, box
	3.	transport adhesion promoter solution, in cart, to laurel
	4.	laurel - spin-coat onto wafer pieces
For glass slides (UV ozone cleaned and boxed in 550-553B):
	1.	sts - deposit 200 nm SiNx
	2.	wbsolvent - mix 1 part n-propyl titanate:700 parts n-propanol - 
bottle, cap and bag
	3.	transport adhesion promoter solution, in cart, to laure
	4.	laurel - spin-coat onto wafer pieces

Amount and Form:
n-propyl zirconate - 250 mL bottle, liquid form
to be added to adhesion promoter solutions

Storage:
Storage group L: Non-Reactive Flammables and Combustibles, including 
solvents
Incompatible with: water and aqueous solutions (will hydrolyze rapidly)

Disposal:
Liquid and solid (gloves, wipes, etc) waste will be collected locally, 
properly labeled and disposed of according procedures that will be 
determined with the safety committee.

Attachments:
1.	MSDS for n-propyl zirconate (NPZ)
2.	Tyzor NPZ product information sheet
3.	Tyzor general brochure

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