Graphite sputtering in metalica

Jim McVittie mcvittie at snf.stanford.edu
Wed May 25 10:13:27 PDT 2005


Specmat,

I do not think a small amount of C sputtering will cause problems to the
Metalica. Sputtering C is not quite the same as sputtering a metal.
Reposition of C on the target leads to nodule growth which intefers with
the sputtering process. Rf or pulsing is usually added for long term C
sputtering.

    Jim

"Franklin, Nathan R" wrote:

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