Graphite sputtering in metalica

Jim McVittie mcvittie at
Wed May 25 10:13:27 PDT 2005


I do not think a small amount of C sputtering will cause problems to the
Metalica. Sputtering C is not quite the same as sputtering a metal.
Reposition of C on the target leads to nodule growth which intefers with
the sputtering process. Rf or pulsing is usually added for long term C


"Franklin, Nathan R" wrote:

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