Sputter deposition of Sn
rissman at stanford.edu
Tue Nov 1 13:58:53 PST 2005
I am copying Dr. Jim Kruger on your message. Jim is a consultant who works
in the SNF fab and has done both sputter and evaporation of tin in our
lab. Hopefully he can answer your questions and help you get started.
Paul Rissman, Director
Stanford Nanofabrication Facility
At 10:11 AM 11/1/2005, you wrote:
>I visited your web site <snf.stanford.edu/Materials/SpecMat/0703.html>
>inquiring about sputter deposition of Sn. I am primarily interested in DC
>magnetron, although any other sputtering means would be worthwhile
>investigating as well. Your website stated "Users should contact Jeannie
>about process settings and deposition rates." Could you please link me to
>her or to whoever might be handling these requests now?
>I am a Process Technologist for Novellus Systems and have done PVD
>research for years. We recently had a customer request for information on
>backside sputter deposition of Sn on 200mm Si wafers. However, I have not
>yet worked with Sn, thus my interest in basic sputter yields, dep rates,
>hardware, etc. using Ar. Reactive sputter deposition (Ar/N2, Ar/O2, etc.)
>may also be of interest, thus any info in that respect would also be great.
>I would greatly appreciate any information from your insight and
>experience with Sn.
>Novellus Systems, Inc.
>4000 N. First Street
>San Jose, CA 95134
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