Process request

Yan Zhu yzhu at ee.ucr.edu
Thu Nov 17 09:12:21 PST 2005


Hi,

I have some process like this: Dry oxide + Ti (Gryphon) + LTO, (Ti is cover with LTO) and then I need deposit 2500A poly si, which machine I can use to deposit poly? After the photo process, I need to etch Poly and stop at oxide, may I use STS DRIE for this?

Thanks
Yan Zhu
yzhu at ee.ucr.edu





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