Process request

Jim McVittie mcvittie at snf.stanford.edu
Mon Nov 21 18:49:38 PST 2005


Mary,

Her English is not great. I am confused. Can you explain what she wants to do?

    Thanks, Jim

Mary Tang wrote:

> Hey Ed, et al --
>
> Did we resolve this?  She's just been trained on STS, but I really do think
> that drytek is better for her application.  No only does she have pieces
> (?) but it appears that her criterion of highest selectivity possible isn't
> really all that important after all.  Basically, though, we need to tell her
> how she can deposit poly and where she can etch it and clean the resist.
> (I'm presuming we can consider this all semiclean?)
>
> Mary
>
> Quoting Yan Zhu <yzhu at ee.ucr.edu>:
>
> > Hi,
> >
> > I have some process like this: Dry oxide + Ti (Gryphon) + LTO, (Ti is
> > cover with LTO) and then I need deposit 2500A poly si, which machine I
> > can use to deposit poly? After the photo process, I need to etch Poly and
> > stop at oxide, may I use STS DRIE for this?
> >
> > Thanks
> > Yan Zhu
> > yzhu at ee.ucr.edu
> >
> >
> >




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