Fwd: Re: process

Mary Tang mtang at stanford.edu
Wed Nov 23 15:52:53 PST 2005

>From Yan.

----- Forwarded message from yzhu at ee.ucr.edu -----
    Date: Wed, 23 Nov 2005 15:08:55 -0800 (PST)
    From: yzhu at ee.ucr.edu
Reply-To: yzhu at ee.ucr.edu
 Subject: Re: process
      To: Mary Tang <mtang at stanford.edu>

Hi Mary,

The starting material is 500mm silicon wafer. After the oxidation furnace,
it will become pieces. I will use diamond knife to cut it. Marrice has
told me to do the pieces at the Gryphon. For cleaning, I will use my own
seperate holder to clean at the wet bench (silicide and diff wet bench).
Karlsuss will be my exposure tool, I used it at other lab. It is good for
1um feature. But I still need to try at your lab, because photo resist is
different. The coating machine is headway. Resist clean is Gasonic.

hope this helps.

> Hi Yan --
> I'm sorry, but I think we really need more specific detail about your
> process flow.  For example...  Is your starting material 100 mm silicon?
> If so, when does it become "pieces"?  And how?  Processing pieces in
> gryphon, for example, may be a problem.  Cleaning your pieces may be
> tricky
> at some steps as well, and you may need to obtain and decontaminate
> labware
> to do this.
> Could you please outline your process flow in detail, including every
> pre-deposition or pre-diffusion clean, resist coat, aligner (I am not sure
> which aligner you can use pieces in which has one micron resolution),
> develop, etch and resist clean step?  If you know which equipment you will
> be using at each of these steps, it would be helpful.  If you have any
> specific critical process requirements, it would also be helpful.
> Thanks,
> Mary
> Quoting yzhu at ee.ucr.edu:
>> Hi,
>> I have asked some process last week, they will be: Dry oxide + Ti
>> (Gryphon) + LTO, (Ti is cover with LTO) and then I need deposit poly si,
>> which machine I can use to deposit poly? After the photo process, I wish
>> to etch poly and stop at oxide, then use amtetcher to etch oxide and
>> stop
>> at si substrate. The poly thickness will be around 2500A, because it is
>> the gate poly, so the feature size is 1um. The underlying LTO is not
>> important, because they also need to be etched away with Amtetcher.
>> Later
>> on, the process just is deposit thick oxide and make contact for metal
>> pattern. The sample I processed are mainly pieces.
>> So I still have two concerns: 1. is the STS DRIE best choice for poly
>> etching. 2. how to deal with pieces with Amtetcher.
>> Thanks for your consideration.
>> Yan zhu

----- End forwarded message -----

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