ALD HfO2 in Prof. McIntyre's Lab

Ching-Huang Lu ratiug at stanford.edu
Tue Oct 4 10:59:14 PDT 2005


Dear Committee,

Raghav and I  have been trying to build transistors with ALD HfO2 in Prof. McIntyre's Lab. 
We would like to get this ALD film certified so that we can start the processing in the semi-clean tools. 
Attached please find the TXRF data file. This TXRF data obtained on our ALD HfO2 shows that the film is pretty clean. 
Please let us know if you have any question or need more information.

thanks


Ching-Huang

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