Aluminum nitride approval request

Benjamin Chui bwchui at
Mon Sep 19 12:01:53 PDT 2005

Hello specmat team,

   I'd like to request approval to bring wafers with deposited aluminum
nitride (AlN) film into the SNF clean room.  I hope this is OK since
users are specifically using AlN in place of PZT for its CMOS
compatibility in building piezoelectric sensors.  The company
depositing the AlN also cites this advantage.


Ben Chui

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