Co silicide

Yan Zhu yzhu at ee.ucr.edu
Wed Sep 21 18:35:48 PDT 2005


Hi,

I am a new member of the SNF. I will do some Cobalt silicide experiment, may I know if Cobalt silicide wafer can be loaded into the LTO furnace? And which machine is semi-clean, so I can deposit Cobalt before going to the LTO furnace?
  
Thanks
Yan Zhu
yzhu at ee.ucr.edu





More information about the specmat mailing list