Co silicide

Yan Zhu yzhu at
Wed Sep 21 18:35:48 PDT 2005


I am a new member of the SNF. I will do some Cobalt silicide experiment, may I know if Cobalt silicide wafer can be loaded into the LTO furnace? And which machine is semi-clean, so I can deposit Cobalt before going to the LTO furnace?
Yan Zhu
yzhu at

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