Fwd: Gallium Nitride

Jim McVittie mcvittie at snf.stanford.edu
Wed Apr 5 17:25:27 PDT 2006


Ed,

GaN is not new to SNF. Our III-V users have been bring it into our lab for maybe 10 yrs.
It has been etched in both Drytek4 and the PQ.   Jim

Ed Myers wrote:

> I was looking into the MSDS sheets for Gallium Nitirde.  There is not much
> information on health hazards.  The only troubling item is the material is
> water or humidity sensitive.  The released compound is ammonia.  I'm afraid
> we might get an ammonia smell in the fab when we open the chamber and when
> we regen the cryo.
>
> Should we require a couple of partial vent-pumpdown cycles prior to lifting
> the chamber?  The next question regards our internal hardware.  Can we let
> them use ours or should we have them use the ZnCdS hardware?
>
> Ed
>
> >X-Sieve: CMU Sieve 2.2
> >Delivered-To: emyers at snf.stanford.edu
> >Mailing-List: contact specmat-help at snf.stanford.edu; run by ezmlm
> >X-No-Archive: yes
> >List-Post: <mailto:specmat at snf.stanford.edu>
> >List-Help: <mailto:specmat-help at snf.stanford.edu>
> >List-Unsubscribe: <mailto:specmat-unsubscribe at snf.stanford.edu>
> >List-Subscribe: <mailto:specmat-subscribe at snf.stanford.edu>
> >Delivered-To: mailing list specmat at snf.stanford.edu
> >From: "Jia Feng" <fengj at stanford.edu>
> >To: <specmat at snf.stanford.edu>
> >Cc: "FENGJ" <fengj at stanford.edu>
> >Subject: Gallium Nitride
> >Date: Wed, 22 Mar 2006 16:13:13 -0800
> >X-Mailer: Microsoft Outlook Express 6.00.2800.1506
> >
> >Special Material Committee:
> >
> >I am writing to you to get your approval to use Gallium Nitride in SNF.
> >The information you require is provided as follows.
> >
> >1. Your contact information: Name, Coral login, phone number, email
> >address and who you work for (your PI or company.)
> >
> >Name: Jia Feng
> >Coral login: fengj
> >Phone number: 650-725-4549
> >Email address: fengj at stanford.edu
> >PI: James D Plummer
> >
> >2. The chemical or material.
> >
> >Material: Gallium Nitride
> >Please see the MSDS in the attachment
> >
> >3. Vendor/manufacturer info: address and phone number, website URL.
> >
> >Technologies and Devices International, Inc.
> >12214 Plum Orchard Dr., Silver Spring, MD 20904 USA
> >TEL: +1 301 572 7834; FAX: +1 301 572 6435;   www.tdii.com
> >
> >4. Reason for request
> >
> >We are planning to do RF sputtering of Gallium Nitride onto 4-inch Silicon
> >wafers and investigate its crystallization.
> >
> >5. Process Flow.
> >
> >(1) RF sputtering in metallica, thickness: ~ 0.1 um
> >(2) Deposit 0.02-um SiO2 in sts PECVD
> >(3) Optical lithography in nikon, using 3612 photoresist
> >(4) Photoresist descum in drytek4
> >(5) Dry etch in pquest
> >(6) Photoresist removal in matrix
> >(7) Clean in PRS-1000 (heated to 40 C) in wbgaas
> >(8) Deposit 0.1-um SiO2 in sts PECVD
> >(9) Heating to 800 C for 1 second in rtagaas
> >(10) Cut the Silicon substrate using wafersaw. The GaN has already been
> >etch into 1-um wide and 10-um long stripes and covered with SiO2. With
> >visible marks etched on the wafer, the wafersaw blade will only cut into
> >the Silicon substrate without contacting or exposing any GaN.
> >
> >6.. Amount and form.
> >
> >The Gallium Nitride we will bring into the lab is 1-inch poly-crystalline
> >target for RF sputtering.
> >
> >7. Storage: Will you be storing your chemical/material at SNF? If so,
> >please note any potential reactivities (this should be on the MSDS).
> >
> >We will store the Gallium Nitride target in vacuum sealed bags.
> >
> >8. DIsposal
> >
> >The Gallium Nitride will either be dry etched or stay on the wafer.
> >
> >Thanks,
> >Jia Fe
>
>   ------------------------------------------------------------------------
>                                                   Name: CCOHS MSDS Record Number 4173028.pdf
>    CCOHS MSDS Record Number 4173028.pdf           Type: Acrobat (application/pdf)
>                                               Encoding: base64
>                                        Download Status: Not downloaded with message
>
>                                                   Name: CCOHS MSDS Record Number 4168791.pdf
>    CCOHS MSDS Record Number 4168791.pdf           Type: Acrobat (application/pdf)
>                                               Encoding: base64
>                                        Download Status: Not downloaded with message
>
>    Part 1.4           Type: Plain Text (text/plain)
>            Download Status: Not downloaded with message




More information about the specmat mailing list