[Phosphorosilicafilm 5e20]

Saeroonter Oh sroonter at stanford.edu
Thu Feb 2 16:23:25 PST 2006


Hello,

1. Contact Info
Name: Saeroonter Oh
coral: sroonter
Phone: 650-353-1266
Email: sroonter at stanford.edu
PI: Prof. Philip Wong

2. Chemical
Name: Phosphorosilicafilm 5x10(20)
Manufactured by EMULSITONE
CAS Number: 141-78-6

MSDS:
------SECTION I - HAZARDOUS INGREDIENTS ------

NAME                           CAS#                   NATURE OF HAZARD

ETHYL ACETATE                   141-78-6              FLAMMABLE

ETHYL ALCOHOL                    64-17-5              FLAMMABLE

METHYL ALCOHOL                   67-56-1              FLAMMABLE

PHOSPHORUS PENTOXIDE           1314-56-3              IRRITANT


------SECTION II - PHYSICAL DATA ------

BOILING POINT: 176 DEG. F

SPECIFIC GRAVITY: 0.88

VAPOR PRESSURE: 50.4 MMHg (20 DEG. C)

PERCENT VOLATILE BY VOLUME: 80%

VAPOR DENSITY (AIR = 1): 1.66

SOLUBILITY IN WATER: SOLUBLE

APPEARANCE AND ODOR: CLEAR SOLUTION, ALCOHOL-VINEGAR ODOR


------SECTION III - HEALTH HAZARD DATA ------

THRESHOLD LIMIT VALUES:

ETHYL ACETATE:
OSHA STD - AIR: TWA 400 PPM (SKIN)

ETHYL ALCOHOL:
OSHA STD - AIR: TWA 1000 PPM (SKIN)

METHYL ALCOHOL:
OSHA STD - AIR: TWA 200 PPM

EFFECTS OF OVEREXPOSURE:

INHALATION:
EXPOSURE TO MORE THAN ABOVE LISTED THRESHOLD LIMIT MAY CAUSE HEADACHE,
DROWSINESS AND LASSITUDE, LOSS OF APPETITE, THROAT IRRITATION AND INABILITY
TO CONCENTRATE.

INGESTION:
CAN CAUSE DEPRESSION OF CENTRAL NERVOUS SYSTEM. NAUSEA, VOMITING, DIARRHEA.
SEE EMERGENCY FIRST AID PROCEDURES BELOW FOR FURTHER INFORMATION.

EYE CONTACT: LIQUID OR VAPOR MAY CAUSE IRRITATION.

SKIN CONTACT:
MAY CAUSE IRRITATION AND DEFATTING OF SKIN ON PROLONGED CONTACT.

OTHER:
INDIVIDUAL RESPONSE TO METHYL ALCOHOL VARY. INGESTION OF LESS THAN 30 ML HAS
BEEN FATAL TO HUMANS. IN GENERAL, A FEW OUNCES MAY CAUSE BLINDNESS OR DEATH.
AS LITTLE A 4 ML MAY BE TOXIC IF INGESTED.

EMERGENCY FIRST AID PROCEDURES:

FOR OVEREXPOSURE BY:

SWALLOWING:
THIS PRODUCT CONTAINS METHYL ALCOHOL. IF VICTIM IF CONSCIOUS AND ABLE TO
SWALLOW, HAVE VICTIM DRINK WATER OR MILK TO DILUTE. NEVER GIVE ANYTHING BY
MOUTH IF VICTIM IS UNCONSCIOUS OR HAVING CONVULSIONS. CALL A PHYSICIAN OR
POISON CONTROL CENTER IMMEDIATELY. INDUCE VOMITING ONLY IF ADVISED BY
PHYSICIAN OR POISON CONTROL CENTER.

INHALATION:
IMMEDIATELY REMOVE VICTIM TO FRESH AIR. IF VICTIM HAS STOPPED BREATHING,
GIVE ARTIFICIAL RESPIRATION, PREFERABLY MOUTH-TO-MOUTH. GET MEDICAL
ATTENTION
IMMEDIATELY.

CONTACT WITH EYES OR SKIN:
IMMEDIATELY FLUSH AFFECTED AT LEAST 15 MINUTES. REMOVE AND CLEAN OR DISPOSE
OF CONTAMINATED CLOTHING IN ACCORDANCE WITH APPROPRIATE FEDERAL, STATE AND
LOCAL REGULATIONS. GET MEDICAL ATTENTION IMMEDIATELY.


------SECTION IV - FIRE AND EXPLOSION HAZARD DATA ------

FLASH POINT: 131 DEG. F (OPEN CUP)

FLAMMABLE LIMITS:
LEL: 2.2%
UEL: 10.7%

EXTINGUISHING MEDIA:
DRY CHEMICAL, CARBON DIOXIDE, OR ALCOHOL "FOAM". WATER MAY BE INEFFECTIVE,
BUT
SHOULD BE USED TO KEEP FIRE-EXPOSED CONTAINERS AND SURFACES COOL. IF A LEAK
OR
SPILL HAS NOT IGNITED, USE WATER SPRAY TO DISPERSE VAPORS AND TO PROTECT MEN
ATTEMPTING TO STOP LEAK. WATER SPRAY MAY BE USED TO FLUSH SPILLS AWAY FROM
EXPOSURE AND TO DILUTE SPILLS TO NON-FLAMMABLE MIXTURES (NFPA-49 1975).

SPECIAL FIREFIGHTING PROCEDURES:
FIREFIGHTERS SHOULD WEAR SELF-CONTAINED BREATHING APPARATUS IN THE POSITIVE
MODE WITH FULL FACEPIECE WHEN THERE IS A POSSIBILITY OF EXPOSURE TO SMOKE,
FUMES OR HAZARDOUS DECOMPOSITION PRODUCTS.


------SECTION V - REACTIVITY DATA ------

STABILITY: STABLE

INCOMPATIBILITY: STRONG OXIDIZERS

HAZARDOUS DECOMPOSITION PRODUCTS:
AS WITH ALL ORGANIC SOLVENTS, COMBUSTION WILL PRODUCE CARBON DIOXIDE, CARBON
MONOXIDE AND WATER.

HAZARDOUS POLYMERIZATION: WILL NOT OCCUR.


------SECTION VI - SPILL OR LEAK PROCEDURES ------

IF A LEAK OR SPILL OCCURS:
WEAR APPROPRIATE PROTECTIVE CLOTHING AS DESCRIBED IN SECTION VII BELOW.
ELIMINATE ALL IGNITION SOURCES. SMALL SPILLS (UP TO ONE GALLON) MAY BE
COLLECTED WITH ABSORBENT MATERIAL. FOR LARGER UNCONTROLLED RELEASES, FLUSH
SPILL AREA WITH WATER SPRAY. PREVENT RUNOFF FROM ENTERING DRAINS, SEWERS AND
STREAMS. USE WATER SPRAY TO DISPERSE VAPORS. DISCARD CONTAMINATED CLOTHING
ONLY IN ACCORDANCE WITH FEDERAL, STATE AND LOCAL REGULATIONS.

WASTE DISPOSAL METHOD:
OBSERVE ALL FEDERAL, STATE AND LOCAL LAWS REGARDING HAZARDOUS WASTE REMOVAL
AND RECYCLING.


------SECTION VII - SPECIAL PROTECTION INFORMATION ------

RESPIRATORY PROTECTION:
USE APPROPRIATE NIOSH-APPROVED RESPIRATOR FOR ORGANIC VAPOR IF EXPOSURE IS
LIKELY TO EXCEED ACCEPTABLE LIMITS.

VENTILATION:
GENERAL: AT LEAST 10 AIR CHANGES PER HOUR FOR GOOD GENERAL ROOM VENTILATION.
LOCAL EXHAUST: IF NEEDED TO CONTROL VAPOR.

SKIN AND EYE PROTECTION:
SAFETY GLASSES SHOULD BE WORN IF THERE IS ANY DANGER OF SPLASHING. PERSONS
WITH SENSITIVE SKIN SHOULD WEAR GLOVES AND PROTECTIVE CLOTHING.


------SECTION VIII - SPECIAL PRECAUTIONS ------

HANDLING AND STORAGE:
STORE THIS SOLUTION IN A COOL, DRY PLACE. AS WITH ANY CHEMICAL, USE
REASONABLE
CARE IN STORAGE, APPLICATION AND DISPOSAL.


------SECTION IX - SHIPPING REGULATIONS ------

PROPER SHIPPING NAME: ETHANOL SOLUTION, UN1170

IATA REGULATIONS:

LABELS: FLAMMABLE LIQUID

QUANTITY LIMITS                  PKG. INST.            PKG. GROUP

PASSENGER AIRCRAFT:              309                   III
60 LITERS/PACKAGE

CARGO AIRCRAFT:                  310                   III
220 LITERS/PACKAGE

DOT REGULATIONS: ETHANOL SOLUTION, UN 1170

LABELS: FLAMMABLE LIQUID



3. Vendor: EMULSITONE COMPANY
Address:
19 Leslie Court
Whippany, New Jersey 07981
TEL. (973)386-0053
FAX (973)503-0256
http://emulsitone.com/

4. Reason for request
Attatched file: 2003 paper on "Proximity Rapid Thermal Diffusion" (Alan
Seabaugh group)
Need abrupt shallow junctions in Si, Ge, GaAs.


5. Process flow
There's a source wafer and a target wafer.

The Emulsitone phosphorosilicafilm is spin coated on a cleaned source wafer.
Then bake. Three cleaned spacers(wafer strips) are placed on top of source
wafer and target wafer is placed on top of the spacers facing down.
Then RTA. Then cleaned in buffered HF.

Eventually going to make silicon pn diodes.
I'm measuring the btbt leakage in pn junctions for various materials(Si,
Ge..)

- Equipment used?
Karlsuss
RTA
Drytek
wetbenches before/after doping
I don't know where to spin this on? Can I use Headway?

6. Amount and form
4 oz
liquid form


7. Storage
One of the flammable cabinets after labeling.
HANDLING AND STORAGE:
STORE THIS SOLUTION IN A COOL, DRY PLACE. AS WITH ANY CHEMICAL, USE
REASONABLE CARE IN STORAGE, APPLICATION AND DISPOSAL.


8. Disposal
IF A LEAK OR SPILL OCCURS:
WEAR APPROPRIATE PROTECTIVE CLOTHING AS DESCRIBED IN SECTION VII BELOW.
ELIMINATE ALL IGNITION SOURCES. SMALL SPILLS (UP TO ONE GALLON) MAY BE
COLLECTED WITH ABSORBENT MATERIAL. FOR LARGER UNCONTROLLED RELEASES, FLUSH
SPILL AREA WITH WATER SPRAY. PREVENT RUNOFF FROM ENTERING DRAINS, SEWERS AND
STREAMS. USE WATER SPRAY TO DISPERSE VAPORS. DISCARD CONTAMINATED CLOTHING
ONLY IN ACCORDANCE WITH FEDERAL, STATE AND LOCAL REGULATIONS.

WASTE DISPOSAL METHOD:
OBSERVE ALL FEDERAL, STATE AND LOCAL LAWS REGARDING HAZARDOUS WASTE REMOVAL
AND RECYCLING.

Thank you,

Saeroonter




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