SpecMat Proposal: Polystyrene Nanoparticles
mtang at stanford.edu
Mon Feb 6 11:06:54 PST 2006
Hi Chris --
Sorry for the delay. Your Specmat request was approved, with a few
caveats. Please let us know if there are concerns on your part for any
of these. From our notes, we have the following:
1. SiO2 deposition on silicon wafers.
2. Spincoating of polystyrene microspheres, to be performed at Prof.
3. RIE using drytek2, using CF4/O2 in 2:1 ratio. *SpecMat requests
that you perform a 15 minute O2 plasma clean following your process, to
remove any polystyrene spheres that may have come off the wafers.
*4. Etching on the AMTEtch through SiO2. *SpecMat requests that you
perform the 5 minute NF3 cleanup in the recipe 2 after processing your
wafers (this is part of the standard procedure for this recipe.)*
5. Remove polystyrene microspheres using dichloromethane. *SpecMat
requests that if this is to be done at wbsolvent at SNF, that an
alternative to dichloromethane be considered, as this is a known
carcinogen. If this is to be done in Prof. Wang's lab, then please use
glassware that has not been exposed to metals (as in liftoff.)*
6/7. Wafer decontamination at SNF. *SpecMat requests that you use the
5:1:1 Water:HCl:H2O2 cleaup used for decontaminating wafers exposed to
KOH etching. This is available online at:
these procedures, "lampoly" can be used. (Please note that normally
before going into a "clean" furnace process, a piranha clean at
wbnonmetal and pre-diff clean at wbdiff are required. However, since
lampoly runs at a low process temperature, the KOH decontamation [in
appropriate labware, if done at wbgeneral] properly done, should be
sufficient in controlling contamination. If you wish to change your
process from lampoly in the future, please submit a SpecMat request so
that we can check for the appropriate cleans.)*
Thanks for your patience!
Chris Earhart wrote:
> Dear SpecMat Committee,
> I was curious if you had reviewed my application for the use of
> polystyrene nanoparticles at SNF. Please let me know when you have
> any updates regarding my proposal, or if you have any questions that I
> can address.
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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